Etching/ Material removal
products
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SCRUBBER WET TYPE
W3000: Wet Scrubber for Semiconductors, LCD, and LED Gas Processing: Wet Processing Capacity: 1500 LPM Dimensions (Cabinet): 1000(W) x 1230(D)…
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SCRUBBER DRY TYPE
ARENS: Dry Type Resin Scrubber Gas Processing: Resin (chemicals) Processing Capacity: 200 LPM Dimensions (Cabinet): 870(W) x 850(D) x 1700(H)…
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SCRUBBER HEATER TYPE
WET BURN WET SCRUBBER Powder pre-treatment Powder gas abatement Direct combustion UN2000A-BWHeat-wet scrubber compatible with semiconductor applications MAGMA1000Heat-wet scrubber compatible…
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SCRUBBER PLASMA TYPE
TOM 1000 Plasma-wet scrubber compatible with semiconductor applications Gas Processing: PLASMA WET Processing Capacity: 300 LPM Dimension (Cabinet): 800(W) x…
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SCRUBBER BURN WET TYPE
BURN WET SCRUBBER PFC Gas Abatement LNG flame Direct Combustion TRITONMaximizes the PM lifecycle with pre-processing effect for water-soluble gas…
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Filter Regeneration/Cleaning
Filter regeneration loop for Cartridges and disposable filter. Focus on PTFE membrane, PFA support net, PFA core, end cap and…
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ATEX (SOLVENT) PUMPS
Graco’s air-operated double diaphragm pumps feature a stall-free, low-pulsation air valve that is externally accessible—ensuring rapid changeovers and minimal downtimes.…
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PFA Storage Vessel
PFA Storage Vessel High Purity PFA Storage Tanks Used as buffer tanks or drain storage containers in Chemical Delivery Systems…
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PRESSURE VESSELS
Dispense Chemicals with Absolutely No Pulsation White Knight’s PTFE and PFA pressure vessels provide laminar flow at the point of…
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Accubath™ PVDF, PFA Welded Tanks
White Knight/Imtec's process and rinse tanks are constructed from a single sheet of application specific plastic material that is CNC…
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PTFE molded process tanks
PTFE molded tanks. Many molds sizes available for tanks ranges from 40L - 550L . We can included customized locations…
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ACCUBATH™ (HEATED) QUARTZ PROCESS TANKS
Static Quartz Heated TanksHigh Operating Temperatures – Operates up to 190 °C and can be used with any quartz-compatible chemistries.Flexibility –…
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CHILLER HEAT EXCHANGER TYPE
PCS150KUH + SECA150K (Ultra High Temperature) Stable operation under high temperature conditions Fume Monitoring System Leak-proof design with gasket Diagnostic…
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Chiller Hybrid Type
Hybrid Type Chillers (RPT7500C and HCS7500C) Flow rate up to 50 LPM Power range: 2 – 20 kW Temperature range:…
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Chiller Refrigerant Type
Refrigerant Type Chillers (including Cryogenic Types) Models: RUCS30000Z (Ultra Low Temperature), RCS6000Z Temperature range: -100°C to 60°C Power range: 2…
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CAST-X High Temp Circulation Heaters (stainless steel tubes)
With a temperature range up to 1112°F (600°C), the CAST-X high-temp circulation heaters feature bronze bodies. Applications: Rocket and jet…
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CAST-X Circulation Heaters (stainless steel tubes)
Offered in 6 sizes with up to 60 kW, CAST-X Heaters feature 316 SST flow tubes with multiple enclosures &…
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Universal Solvent Heater (stainless steel tubing)
A premium cast-in circulation heater with stainless steel tubing providing an array of special features to safely heat volatile solvents.…
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Accuheat™ Quartz In-Line Gas Heaters
Accuheat™ G-Series Gas HeatersQuartz is the only material to contact gases being heated, which prevents particle adders and contaminants. The…
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Accuheat™ PFA In-Line Solvent Heaters
For heating solvents such as IPA (isopropyl alcohol), NMP, and much more, IMTEC introduces the high-purity PFA solvent inline heater.…
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Accuheat™ Quartz In-Line Chemical Heaters
Accuheat™ chemical in-line heaters consist of ultrapure quartz tubes wrapped in an Inconel heater element that provides even, conductive heat…
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Accuheat™ PFA In-Line Chemical Heaters
White Knight/Imtec high-purity Accuheat PFA in-line heaters are designed for hydrofluoric acid (HF), potassium hydroxide (KOH), and other chemistries compatible…
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M400 Liquid flow controller Pinch Type (CMP/SLURRY)
Liquid Flow Controller LFC for SLURRY is a high-quality, high-precision semiconductor and industrial contactless Ultrasonic flow METER. • Target volume…
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M300 Ultrasonic Liquid Flow controller (LFC) electrical
The comprehensive solution MOTOR TYPE LFC is a high-quality, high-precision semiconductor and industrial non-contact LFC with built-in control valves •…
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M200 Ultrasonic liquid flow controller (LFC) air operated
Two types available, one for use in recirculation (circular) and one for point of use (series general). Accurate flow measurement…
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M100 ULTRASONIC FLOW METER
Instantaneous and integrated flow meter (ml/min) for accurate flow measurement with ultrasonic waveform analysis scope function. Includes automatic compensation for…
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Chemical Resistant Miniature Solenoid Valves
White Knight/iPolymer Miniature Solenoid Valves include 2-way and 3-way valves with a variety of body configurations, seat sealing methods, and…
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(DILUTION) DRAIN VALVE
White Knight/iPolymer iPolymer Drain Valve (DV) is a large orifice valve capable of handling large volumes of corrosive fluids via…
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DI WATER VALVES
White Knight/iPolymer DI Water Valves are perfect 2-way valves for DI water.The DI Water Valve wetted flow path is free…
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PFA/PTFE CHECK VALVES 2 way flow
ChatGPT said: High-Purity 2-Way Check Valves Designed for high-purity chemical and fluid systems, these 2-way flow check valves offer space-saving…
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PTFE temperature sensor GCT100
Designed for accurate temperature measurement in high-purity chemical and slurry applications.Major Functions & Features Sensor: PT100 Applications: Slurry and chemicals…
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PTFE Pressure Transducer GSC series
PTFE Pressure Transducer – GSC Series The GSC Series PTFE Pressure Transducer is designed for high-purity chemical applications, offering reliable…
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Automated Parts Cleaning Systems
JST’s Automated Parts Cleaning System services a multitude of parts, performs a variety of chemical processes, and restores specialty parts…
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Automated Box Washer
Automated Box WasherDry-to-dry wet bench designed for cleaning wafer cassettes, transport boxes, lead frames, FOUPs, SMIF Pods, and other wafer…
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Chemical Fume Hood
JST Chemical Fume HoodDesigned to provide a safe environment when working with volatile chemistries by enclosing the entire work surface.…
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Triax Compact Wet Bench
JST 3-Axis Compact Automated Wet Bench Ideal for space limited cleanrooms demanding increased throughput bringing automation to manual production. Processes…
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Heat Exchangers PTFE
Wooam is very knowledgeable making heat exchangers. They produce High Purity PTFE heat exchanger in different surfaces Some models available…
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TraceTek® Leak Detection Systems
Water is everywhere in modern buildings, and that’s fine, as long as it stays where it belongs—in the process areas,…
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CO2 Fire Safety Systems
Engineered CO2 Fire Protection Systems for Semiconductor Applications Koetter Fire Protection International (KFPI) is an authorized distributor of the leading…
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Installations, Inspections, & Audits
KFPI Semiconductor Fire Safety Expertise Includes Fire Suppression System: Installations InspectionsAudits Fire Safety System Installations from the global leader in…
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PFA ultrapure tube and pipe
High-Purity Fluoropolymer Tubing & Piping All products are manufactured in a dedicated high-purity extrusion facility, ensuring compatibility with ultra-clean chemical…
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PFA Pipe fittings
PFA Pipe Fittings (Fusible Fitting) Designed for PFA piping and equipment connections Butt welding method ensures stronger, more secure joints…
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PFA “Masterlock” fittings
UNION FITTING The UNION FITTING is widely used on main and sub-line PFA pipings that connect with CCSS and WET…
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PFA Pneumatic valve (reinforced)
ACA Pneumatic Valve All wetted parts of the ACA Pneumatic Valve are constructed from PFA to deliver optimal performance in…
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PFA manual valves (reinforced)
ACA Manual Valve Constructed entirely of fluorine resin, the ACA Manual Valve is engineered for optimal performance in high-purity chemical…
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PFA Pneumatic Valve
GCA Pneumatic Valve All wetted parts of the GCA Pneumatic Valve are made of high-purity PFA material, designed to deliver…
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PFA Manual Valves
G.C.A. Manual Valve Made entirely of high-purity fluorine resin, the G.C.A. Manual Valve is designed for optimal performance in handling…
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Quick Connectors
We offer a wide range of Quick Connectors for high purity applications. Operation Temp. : 5℃~70℃ Operation Pressure : <…
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Degasser/Degassing module
This degassing module is aimed to remove microbubbles from High Purity water or chemical applications Size (mm) Ø89.1×296(H) Material Body…
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Vortex PFA flow flowmeter
Tokico PFA Vortex Flow MeterTokico's PFA flow meter has no moving parts, with all wetted parts made of PFA resin…
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Electronic Grade · Low Extractable Filter
EPPX Filter Cartridge Series EPPX series cartridge is an upgrade to EPP. EPPX Filter Cartridges are constructed of electronic grade…
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Prifend High Flow DI Water Filter
FDPHF Filter Cartridge Series Cobetter FDPHF High Flow Filter Cartridge is a large diameter, single open-ended pleated cartridge filter with…
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Apesfend Electronic-Grade DI Water Fine Filtration Filter
FDS Filter Cartridge Series Apesfend Filter Cartridges are constructed of a high polymer-based asymmetric PES membrane which provides high dirt…
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Prifend Long Lifetime Pre-RO Cartridge Water Filter
FDP Filter Cartridge Series Cobetter High Service Time FDP (Guard Filters) Filter Cartridges are made of continuously rolled microfiber. They…
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Resin PP/PVDF Constructed Filter Housing
Resin Filter Housing Series The cage media of the Resin Filter Housing Series is composed of PP, PVDF, or PC…
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CMP Slurry Filtration Solution
CMP Polishing System Filters Suitable for CMP polishing systems in slurry recirculation/global loop and at point-of-use (POU). Features Nano-fiber Media:…
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Gasfender Ultra-pure Gas Cartridge Filter
GasfenderGasfender is constructed of electronic-grade stainless steel, specially designed for inline gas filtration in semiconductor processes at high temperatures and…
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Photogile POU Filter capsule for Litho
Photogile POU Filter One-piece construction is easy to install, clean, and replace this filter capsule. Available in a wide range…
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Photopex Litho filters
Photopex Nylon Ultra-high Efficiency Filter With high flow rate performance, excellent retention capabilities and cleanliness, Cobetter Photopex Nylon Filter Cartridges…
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Fluorolink All Fluoropolymer Filter Housing
Filter Housing Features Overall PFA construction makes it suitable for highly corrosive, high-temperature, ultra-pure chemicals Filter’s cleanliness reduces equipment pre-operation…
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Chemrapid Surface-modified Ultrapure Chemicals Filter
Cobetter Chemrapid Filter Series Cobetter Chemrapid Filter Series is composed of a surface-modified PTFE membrane bonded with PFA, resulting in…
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Chemega High-Efficiency Filtration for Chemicals
Chemega Filter Cartridge Series Chemega is constructed of a PTFE membrane that provides excellent chemical compatibility and is inherently hydrophobic.…
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Chemphobic Ultrapure Chemical Filter
Cobetter Chemphobic Filter Series Cobetter Chemphobic Filter Series is especially designed and ideally suited for high-temperature and corrosive chemicals including…
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Novacon Ultra High Precision Chemical Filter
Cobetter Novacon Series High retention efficiency, flow rates, and surface area allow for rapid operation. Cobetter Novacon Series is especially…
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Chemvast Absolute-Rated Filter Cartridges
Cobetter Chemvast Filter Series Cobetter Chemvast Filter Series offers a wide variety of PTFE membranes, including hydrophobic PTFE, hydrophilic PTFE,…
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SPRAY GUNS
iPolymer’s extensive line of PTFE Spray Guns includes DI Water and Chemistry Dispense, Recirculating, Nitrogen, and Eye Wash configurations.Our PTFE…
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Quick Dump Valves
Our Quick Dump ("QD") Valves are designed to rapidly drain process tanks. Constructed from high-purity polymers, which are selected to meet…
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Ultrapure In-Line PVDF/PFA Fluid Heaters
PVDF/PFA ultrapure in-line fluid heaters are ideal for heating deionized water, acids, and less aggressive process chemistries used in high-purity…
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Vesper™ PVDF/PFA Heat Exchangers
Vesper™ Series of PVDF/PFA heat exchangers offer a variety of solutions for heating, cooling, and temperature trimming of fluids used…
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PFA Immersion Tank Heaters
Heateflex immersion tank heaters are ideal for heating fluid baths to a constant temperature. First of all, they are great…
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Aquarius® Deionized Water Heater Systems
Aquarius® deionized water (DIW) heater is the perfect solution for high-purity heating applications requiring accurate temperature control. Aquarius® heaters provide…
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Ultrapure In-Line PFA Fluid Heaters
HC Series In-Line Heaters HC Series in-line heaters are ideal for high-temperature, ultrapure processes. They feature PFA flow paths for…
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AMAT Endura HP+TxZ HEATER 8” (200mm)
Part No: 0010-05692 / 0010-03244/0010-37945/0010-11997 HP+ Txz Heater 8”Spec Power: 208V Heater Element Rs: 21.0Ω Temp: ≤ 400℃
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Heater Block Novellus Concept Ⅰ&Ⅱ Sequal
Boboo's business started with making these Heater block. their Heater blocks have Best Temperature Uniformity Excellent Flatness Cost Competitiveness Heater…
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ESC (Electro Static Chuck)
Boboo Repairs a wide range of 150mm, 200mm and 300mm ESC for LAM and AMAT LAM #374 / #608 /…
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Face seal fittings
Truelok® Face Seal and Mini Weld FittingsTruelok® offers a wide range of face seal and mini weld fittings with surface…
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Ultrasonic Parts Cleaner
JST’s 100 Ultrasonic Parts Cleaner is self contained, fully automated roll in unit designed for precision parts cleaning. Place the…
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Quartz Horizontal Tubewash
JST’s Quartz Horizontal Tubewash Station allows etching and washing of quartz tubes and miscellaneous quartz components. The unit includes two…
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Surface Tension Gradient Dryer (maragoni)
JST’s Combination Rinse and STG Dryer offers Quick Dump Rinsing (QDR) and IPA vapor drying in a single chamber, eliminating…
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IPA Vapor Dryer
JST’s “CLV” Dryer utilizes patented, environmentally friendly, ultra-clean technology for precision drying of silicon wafers, III-V compound wafers, glass substrates,…
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Waste Drum Cabinet
JST Drum Cabinets JST’s drum cabinets can be configured in a variety of ways to safely handle chemistry to and…
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Chemical Neutralization System
JST’s Neutralization reservoirs can be located remotely or within the workstations. Acids are drained into the reservoir where an alkaline solution…
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Pump cart
JST’s self-contained pump cart holds two disposable 5 gallon cans, an air pump with air line to activate the pump and…
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Chemical Delivery Cart
Standard Features Capacity 5 to 40 Gallons Class 10 Cleanroom Compatible Pressurized Chemical Delivery Cart Docks with Quick Connect for…
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Chemical Delivery System
JST’s Chemical Delivery Systems are available using drums for chemical storage or reclaim as well as providing fresh chemistry to process…
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OSPRAY Single Wafer Surface Preparation System
JST OSPRAY Single Wafer Etching and Stripping System JST’s OSPRAY Single Wafer Etching and Stripping System utilizes an automated chemical…
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Spinner and Hot Plate workstation
JST Spinner and Hot Plate Workstations JST’s Spinner and Hot Plate workstations are designed for ease of use and service.…
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Fumehood Design with Ergo Column
JST’s Fume Hood Workstations are made to provide an operator safe environment when working with volatile chemistries. Rinse and process baths…
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Vertical Laminar Flow Workstation (VLF)
JST’s VLF is designed for manual processing of 6″ or smaller wafers in a class 1,000 environment. The headcasing houses the…
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Chemical Workstations
JST’s Chemical Workstations are designed for use as an exhausted work surface for laboratory applications. Even airflow is provided across the…
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Lift Off / Resist Stripping Stations
Whether your metal lift off or resist stripping process demands a fully automated process or simply a manual configuration, JST’s Lift…
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The Tigress – Semi Automated System
JST’s two axis, front to back automated system is a compact, semi-automated system for processes that require uniformity without the…
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Automated Wet Process Equipment
Whether processing 6″, 8″, or 12″ wafers or a combination, JST can design an automated wet process tool to meet…
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Filter Housings
Two-chamber and four-chamber filter housings are available for parallel or series (in-line) operation. Their compact, non-metallic PTFE and PFA designs…
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Debubbler
CBA Series debubblers reduce bubbles from high-purity chemical delivery and wafer process systems. They feature 4-inch inside diameters, which offer…
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Pressure Regulators
Automatically maintain and accurately control pressure for circulation loops or multiple dispense points without additional circuitry or feedback. Pressure regulators…
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Mini-Pump
Mini-pumps offer up to 300 ml/min flow rates and 160 psi discharge pressures. They feature Teflon® PTFE and PFA fluid…
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Metering Pumps
White Knight pneumatic and electronic metering pumps accurately dispense up to 100 ml and 50 ml, respectively. Their fully supported…
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Diaphragm Pumps
hite Knight pneumatic diaphragm (AODD) pumps feature Teflon® PTFE or UHMW (PE) corrosion-resistant fluid paths. They are ideal for corrosive…
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Bellows Pumps
White Knight air-operated double-bellows pumps are used to manufacture semiconductors, photovoltaic solar cells, LEDs, flat-panel displays, and electronics. These high-purity…