Triax Compact Wet Bench

When managing space limitations and a demand for increased throughput, JST’s 3-Axis Compact Automated Wet Bench is ideal for bringing automation into current manual production cleanrooms. Its compact footprint leads the chip manufacturing industry.

• Up to 200mm product size processing capable
• Material Options: 304L stainless steel, 316L stainless steel, FM-approved PVC-C, or white polypropylene
• Internal stainless-steel frames isolated from process chemistry
• Industry-leading compact footprint
• Designed with a programmable logic controller (PLC) in addition to an industrial PC that controls the entire wet bench
• Local data logging of all process parameters and lot tracking stored on the PC’s hard drive
• Ergonomically mounted 23″ color touchscreen monitor, with JST GENII software
• Ergonomically designed front load/unload access for product cassettes
• Operation platforms include Automated Wet Benches, multi-tasking, or semi-automated operation platforms
• Compact three axes linear transfer provides stable high-speed product movement
• Front access maintenance with easy lift-off front roll panel
• Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
• Compatible with any JST chemical or rinse process modules

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