Triax Compact Wet Bench
When managing space limitations and a demand for increased throughput, JST’s 3-Axis Compact Automated Wet Bench is ideal for bringing automation into current manual production cleanrooms. Its compact footprint leads the chip manufacturing industry.
- Up to 200mm product size processing capable
- Material Options: 304L stainless steel, 316L stainless steel, FM-approved PVC-C, or white polypropylene
- Internal stainless-steel frames isolated from process chemistry
- Industry-leading compact footprint
- Designed with a programmable logic controller (PLC) in addition to an industrial PC that controls the entire wet bench
- Local data logging of all process parameters and lot tracking stored on the PC’s hard drive
- Ergonomically mounted 23″ color touchscreen monitor, with JST GENII software
- Ergonomically designed front load/unload access for product cassettes
- Operation platforms include Automated Wet Benches, multi-tasking, or semi-automated operation platforms
- Compact three axes linear transfer provides stable high-speed product movement
- Front access maintenance with easy lift-off front roll panel
- Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
- Compatible with any JST chemical or rinse process modules