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Triax Compact Wet Bench

When managing space limitations and a demand for increased throughput, JST’s 3-Axis Compact Automated Wet Bench is ideal for bringing automation into current manual production cleanrooms. Its compact footprint leads the chip manufacturing industry.

  • Up to 200mm product size processing capable
  • Material Options: 304L stainless steel, 316L stainless steel, FM-approved PVC-C, or white polypropylene
  • Internal stainless-steel frames isolated from process chemistry
  • Industry-leading compact footprint
  • Designed with a programmable logic controller (PLC) in addition to an industrial PC that controls the entire wet bench
  • Local data logging of all process parameters and lot tracking stored on the PC’s hard drive
  • Ergonomically mounted 23″ color touchscreen monitor, with JST GENII software
  • Ergonomically designed front load/unload access for product cassettes
  • Operation platforms include Automated Wet Benches, multi-tasking, or semi-automated operation platforms
  • Compact three axes linear transfer provides stable high-speed product movement
  • Front access maintenance with easy lift-off front roll panel
  • Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
  • Compatible with any JST chemical or rinse process modules

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