Diffusion
products
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Diffusion Furnace Loader
Automatic Furnace Loader with Wafer Transfer Station transfers from cassettes into process boats onto furnace cantilever. Safe and easy loading…
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Compact Tabletop Furnace
SVCS Tabletop Furnace SystemThe SVCS Tabletop Furnace system provides a semiconductor-grade quality tool for universities, R&D laboratories, and pilot fabs.…
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Vertical Furnace for R&D and production
SVCS Vertical Thermal Reactor (VTR)The SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low-pressure CVD processes.…
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Horizontal Diffusion Furnace
SVCS Atmospheric Diffusion FurnacesThe design of the SVCS atmospheric diffusion furnaces combines multiple process capability with the need for maximum…
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Mercury Diffusion Heater (350°C-1250°C)
Features In All Configurations Designed for fast ramp, fast cool operations Proprietary open coil helix design for greater radiant energy…
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Apollo Diffusion Heater (1000°C)
Features In All Configurations Designed for fast ramp, low temp operations Helix coil design for greater zone uniformity Line voltage…
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Hercules Diffusion Heater (1300°C)
Features In All Configurations Built-in reinforcements to guard against element sagging at zone interfaces End vestibules resistant to cracking and…
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Vulcan Diffusion Heater (1350°C)
Features In All Configurations Designed for high-temp operations Built-in reinforcements to guard against element sagging at zone interfaces End vestibules…
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Collars & Heat Disks
Produced from 100% high purity inorganic ceramic fibers of alumina and silica woven into textiles with a soft inner layer.…
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Vestibule Blocks
Produced from our proprietary vacuum-formed ceramic fiber insulation rated up to 1500°C. This is an engineered blend of fibers, resulting…
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Torches
We offer both high and low flow torch elements with an improved design, allowing for greater radiant energy pass through.…
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Diffusion Heater Element Refurb & Service
DS Fibertech Diffusion Heater Element Refurbishment Each rebuilt diffusion heater element is carefully reverse-engineered to ensure exact replication of the…
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Quartz Horizontal Tubewash
JST’s Quartz Horizontal Tubewash Station allows etching and washing of quartz tubes and miscellaneous quartz components. The unit includes two…