products

• Compact Tabletop Furnace

  The SVCS Tabletop Furnace system provides a semiconductor grade quality tool for universities, R&D laboratories and pilot fabs. This system…

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• Vertical Furnace for R&D and production

  SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low pressure CVD processes. VTR is available with several…

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• Horizontal Diffusion Furnace

  The design of the SVCS atmospheric diffusion furnaces combines the multiple process capability with the needs of a maximum capacity…

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• Mercury Diffusion Heater (350°C-1250°C)

  Features In All Configurations Designed for fast ramp, fast cool operations Proprietary open coil helix design for greater radiant energy…

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• Apollo Diffusion Heater (1000°C)

  Features In All Configurations Designed for fast ramp, low temp operations Helix coil design for greater zone uniformity Line voltage…

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• Hercules Diffusion Heater (1300°C)

  Features In All Configurations Built-in reinforcements to guard against element sagging at zone interfaces End vestibules resistant to cracking and…

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• Vulcan Diffusion Heater (1350°C)

  Features In All Configurations Designed for high-temp operations Built-in reinforcements to guard against element sagging at zone interfaces End vestibules…

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• Collars & Heat Disks

  Produced from 100% high purity inorganic ceramic fibers of alumina and silica woven into textiles with a soft inner layer.…

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• Vestibule Blocks

  Produced from our proprietary vacuum-formed ceramic fiber insulation rated up to 1500°C. This is an engineered blend of fibers, resulting…

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• Torches

  We offer both high and low flow torch elements with an improved design, allowing for greater radiant energy pass through.…

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• Diffusion Heater Element Refurb & Service

  Each rebuilt diffusion heater element is carefully reverse engineered to assure exact replication of the original diffusion heater. Element components…

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• Remanufactured Furnances

  Refurbished & rebuilt, customized & enhanced for superior value In addition to making fully new systems, Expertech also is a…

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• Horizontal Thermal Reactor (HTR)

  The low-cost leader for high production throughput solutions & large batch processing Large load sizes (up to 200 wafers per…

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• Vertical Thermal Reactor (VTR)

  Fully automated diffusion furnace, recipe driven loading & processing – with superior uniformity – in a production proven system Automated…

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• Compact Thermal Reactor (CTR)

  The smaller footprint, small batch furnace solution. Production style performance in a small footprint Fully automated, recipe driven processing Ideal…

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• Quartz Horizontal Tubewash

  JST’s Quartz Horizontal Tubewash Station allows etching and washing of quartz tubes and miscellaneous quartz components. The unit includes two baths which…

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