products

• Diffusion Furnace Loader

  Automatic Furnace Loader with Wafer Transfer Station transfers from cassettes into process boats onto furnace cantilever. Safe and easy loading…

  Read More
• Compact Tabletop Furnace

  SVCS Tabletop Furnace SystemThe SVCS Tabletop Furnace system provides a semiconductor-grade quality tool for universities, R&D laboratories, and pilot fabs.…

  Read More
• Vertical Furnace for R&D and production

  SVCS Vertical Thermal Reactor (VTR)The SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low-pressure CVD processes.…

  Read More
• Horizontal Diffusion Furnace

  SVCS Atmospheric Diffusion FurnacesThe design of the SVCS atmospheric diffusion furnaces combines multiple process capability with the need for maximum…

  Read More
• Mercury Diffusion Heater (350°C-1250°C)

  Features In All Configurations Designed for fast ramp, fast cool operations Proprietary open coil helix design for greater radiant energy…

  Read More
• Apollo Diffusion Heater (1000°C)

  Features In All Configurations Designed for fast ramp, low temp operations Helix coil design for greater zone uniformity Line voltage…

  Read More
• Hercules Diffusion Heater (1300°C)

  Features In All Configurations Built-in reinforcements to guard against element sagging at zone interfaces End vestibules resistant to cracking and…

  Read More
• Vulcan Diffusion Heater (1350°C)

  Features In All Configurations Designed for high-temp operations Built-in reinforcements to guard against element sagging at zone interfaces End vestibules…

  Read More
• Collars & Heat Disks

  Produced from 100% high purity inorganic ceramic fibers of alumina and silica woven into textiles with a soft inner layer.…

  Read More
• Vestibule Blocks

  Produced from our proprietary vacuum-formed ceramic fiber insulation rated up to 1500°C. This is an engineered blend of fibers, resulting…

  Read More
• Torches

  We offer both high and low flow torch elements with an improved design, allowing for greater radiant energy pass through.…

  Read More
• Diffusion Heater Element Refurb & Service

  DS Fibertech Diffusion Heater Element Refurbishment Each rebuilt diffusion heater element is carefully reverse-engineered to ensure exact replication of the…

  Read More
• Quartz Horizontal Tubewash

  JST’s Quartz Horizontal Tubewash Station allows etching and washing of quartz tubes and miscellaneous quartz components. The unit includes two…

  Read More