products

• SCRUBBER WET TYPE

  W3000: Wet scrubber for semiconductors, LCD, and LED - Gas Processing:   WET - Processing Capacity:   1500LPM - Dimension…

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• SCRUBBER DRY TYPE

  ARENS: Dry type resin scrubber - Gas Processing: Resin(chemicals) - Processing Capacity: 200LPM - Dimension (Cabinet): 870(W)X850(D)X1700(H) - Product Features:…

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• SCRUBBER HEATER TYPE

  WET BURN WET SCRUBBER - Powder pre treatment - Powder Gas Abatement - Direct Combustion UN2000A-BW Heat-wet scrubber compatible with…

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• SCRUBBER PLASMA TYPE

  ATOM 1000 - Plasma-wet scrubber compatible with semiconductor - Gas Processing: PLASMA WET - Processing Capacity: 300LPM - Dimension(Cabinet): 800(W)X800(D)X1720(H)…

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• SCRUBBER BURN WET TYPE

  BURN WET SCRUBBER - PFC Gas Abatement - LNG flame - Direct Combustion TRITON Maximizes the PM lifecycle with pre-processing…

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• CHILLER HEAT EXCHANGER TYPE

  Models like PCS150KUH + SECA150K (Ultra high temperature) - Stable operation under high temperature status - Fume Monitoring System -…

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• Chiller Hybrid Type

  Hybrid type Chillers, models like RPT7500C and HCS 7500C - Flow rate up to 50LPM - Power range 2-20kW - Temp…

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• Chiller Refrigerant Type

  Refrigerant type Chillers (a.o Cryogenic types) models like RUCS30000Z for Ultra low temperature and the RCS6000Z. - Temp range 100C…

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• Accuheat™ Quartz In-Line Gas Heaters

  Accuheat™ G-Series gas heaters. Quartz is the only material to contact gasses being heated, which prevent particle adders and contaminates.…

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• Ultra High Purity Liquid Delivery Systems

  Numerous semiconductor and photovoltaic manufacturing processes use source media available only in liquid phase. Sourcing and distribution systems for a…

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• Ultra High Purity Gas Delivery Systems

  SVCS takes advantage of many years of experience in manufacturing tailored gas panels and gas systems for various wafer production…

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• Compact Tabletop Furnace

  The SVCS Tabletop Furnace system provides a semiconductor grade quality tool for universities, R&D laboratories and pilot fabs. This system…

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• Vertical Furnace for R&D and production

  SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low pressure CVD processes. VTR is available with several…

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• Horizontal PECVD Furnace

  The design of the SVCS Plasma Enhanced Chemical Vapor Deposition furnaces combines the multiple process capability with the needs of…

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• Horizontal LPCVD Furnace

  The design of the SVCS Low Pressure Chemical Vapor Deposition furnaces combines the multiple process capability with the needs of…

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• Novellus VECTOR Load Lock Pedestal 300mm

  Features; Temperature Control Reliability Pre-Heat Solution Cost Competitivenes Novellus Vector Load Lock Pedestal Heater 300mm 300 C type     …

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• Novellus VECTOR Process Pedestal 300mm

  Features/specs: Temperature Uniformity Cost Competitiveness Weight: 28.56kg Material: Al 3003 Pipe: Al 3003 Heater Re: 12Ω ±1.5 Novellus Vector Process…

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• Aspen II/III – MATTSON HEATER BLOCK (200mm)

  PN: 303-05255-00 General Pin 3ea ( With Slit 4 ) for PECVD Features ● Leakage free ● Reliability ● Temperature Uniformity ●…

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• Novellus ALTUS PEDESTAL

  Altus Pedestal Heater  features; Reliability Temperature Uniformity Low COC Altus Pedestal Heater 200m Non MOER Ring ( Flat zone Type…

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• AIN(Aluminum Nitride) Heater

  Boboo provide high quality repair for AIN heater. Boboo produces their own ceramic plates. Level 1 : Mount Kit Change &…

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• SPRINGLESS DIAPHRAGM VALVES Ultra High Pure (UHP) Valves

  Low Pressure & High Pressure Valves are  Designed for Ultrahigh Purity Applications, with  SS316L and SS316L VAR Body Electropolished Wetted Surfaces,  Face Seal…

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• IR Halogen (EPI) Lamps

  IR Halogen Lamps QUARTZ INFRARED HALOGEN LAMPS Rhenium Alloys manufactures tubular double-ended (T-Style) infrared (IR) Quartz Halogen Lamps. Our primary…

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• MOCVD Heater Filaments

  For nearly 20 years Rhenium Alloys has been the leader in production of the highest quality rhenium heater filaments for the MOCVD…

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