Deposition
products
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SCRUBBER WET TYPE
W3000: Wet Scrubber for Semiconductors, LCD, and LED Gas Processing: Wet Processing Capacity: 1500 LPM Dimensions (Cabinet): 1000(W) x 1230(D)…
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SCRUBBER DRY TYPE
ARENS: Dry Type Resin Scrubber Gas Processing: Resin (chemicals) Processing Capacity: 200 LPM Dimensions (Cabinet): 870(W) x 850(D) x 1700(H)…
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SCRUBBER HEATER TYPE
WET BURN WET SCRUBBER Powder pre-treatment Powder gas abatement Direct combustion UN2000A-BWHeat-wet scrubber compatible with semiconductor applications MAGMA1000Heat-wet scrubber compatible…
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SCRUBBER PLASMA TYPE
TOM 1000 Plasma-wet scrubber compatible with semiconductor applications Gas Processing: PLASMA WET Processing Capacity: 300 LPM Dimension (Cabinet): 800(W) x…
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SCRUBBER BURN WET TYPE
BURN WET SCRUBBER PFC Gas Abatement LNG flame Direct Combustion TRITONMaximizes the PM lifecycle with pre-processing effect for water-soluble gas…
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CHILLER HEAT EXCHANGER TYPE
PCS150KUH + SECA150K (Ultra High Temperature) Stable operation under high temperature conditions Fume Monitoring System Leak-proof design with gasket Diagnostic…
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Chiller Hybrid Type
Hybrid Type Chillers (RPT7500C and HCS7500C) Flow rate up to 50 LPM Power range: 2 – 20 kW Temperature range:…
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Chiller Refrigerant Type
Refrigerant Type Chillers (including Cryogenic Types) Models: RUCS30000Z (Ultra Low Temperature), RCS6000Z Temperature range: -100°C to 60°C Power range: 2…
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Accuheat™ Quartz In-Line Gas Heaters
Accuheat™ G-Series Gas HeatersQuartz is the only material to contact gases being heated, which prevents particle adders and contaminants. The…
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Ultra High Purity Liquid Delivery Systems
Liquid Source Media in Semiconductor and Photovoltaic Manufacturing Numerous semiconductor and photovoltaic manufacturing processes use source media available only in…
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Ultra High Purity Gas Delivery Systems
SVCS Gas Delivery SystemsSVCS takes advantage of many years of experience in manufacturing tailored gas panels and gas systems for…
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Compact Tabletop Furnace
SVCS Tabletop Furnace SystemThe SVCS Tabletop Furnace system provides a semiconductor-grade quality tool for universities, R&D laboratories, and pilot fabs.…
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Vertical Furnace for R&D and production
SVCS Vertical Thermal Reactor (VTR)The SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low-pressure CVD processes.…
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Horizontal PECVD Furnace
SVCS Plasma Enhanced Chemical Vapor Deposition FurnacesThe design of the SVCS Plasma Enhanced Chemical Vapor Deposition furnaces combines multiple process…
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Horizontal LPCVD Furnace
SVCS Low Pressure Chemical Vapor Deposition FurnacesThe design of the SVCS Low Pressure Chemical Vapor Deposition furnaces combines multiple process…
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Novellus VECTOR Load Lock Pedestal 300mm
Features; Temperature Control Reliability Pre-Heat Solution Cost Competitivenes Novellus Vector Load Lock Pedestal Heater 300mm 300 C type …
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Novellus VECTOR Process Pedestal 300mm
Features/specs: Temperature Uniformity Cost Competitiveness Weight: 28.56kg Material: Al 3003 Pipe: Al 3003 Heater Re: 12Ω ±1.5 Novellus Vector Process…
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Aspen II/III – MATTSON HEATER BLOCK (200mm)
PN: 303-05255-00 General Pin 3ea ( With Slit 4 ) for PECVD Features ● Leakage free ● Reliability ● Temperature Uniformity ●…
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Novellus ALTUS PEDESTAL
Altus Pedestal Heater features; Reliability Temperature Uniformity Low COC Altus Pedestal Heater 200m Non MOER Ring ( Flat zone Type…
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AIN(Aluminum Nitride) Heater
Boboo provide high quality repair for AIN heater. Boboo produces their own ceramic plates. Level 1 : Mount Kit Change &…
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SPRINGLESS DIAPHRAGM VALVES Ultra High Pure (UHP) Valves
Low Pressure & High Pressure ValvesDesigned for Ultrahigh Purity Applications, featuring SS316L and SS316L VAR Bodies with Electropolished Wetted Surfaces,…
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IR Halogen (EPI) Lamps
IR Halogen Lamps — QUARTZ INFRARED HALOGEN LAMPS Rhenium Alloys manufactures tubular double-ended (T-Style) infrared (IR) Quartz Halogen Lamps. Our…
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MOCVD Heater Filaments
For nearly 20 years, Rhenium Alloys has been the leader in the production of the highest quality rhenium heater filaments…