products

• Ultra High Purity Liquid Delivery Systems

  Numerous semiconductor and photovoltaic manufacturing processes use source media available only in liquid phase. Sourcing and distribution systems for a…

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• Ultra High Purity Gas Delivery Systems

  SVCS takes advantage of many years of experience in manufacturing tailored gas panels and gas systems for various wafer production…

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• Compact Tabletop Furnace

  The SVCS Tabletop Furnace system provides a semiconductor grade quality tool for universities, R&D laboratories and pilot fabs. This system…

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• Vertical Furnace for R&D and production

  SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low pressure CVD processes. VTR is available with several…

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• Horizontal PECVD Furnace

  The design of the SVCS Plasma Enhanced Chemical Vapor Deposition furnaces combines the multiple process capability with the needs of…

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• Horizontal LPCVD Furnace

  The design of the SVCS Low Pressure Chemical Vapor Deposition furnaces combines the multiple process capability with the needs of…

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• Novellus VECTOR Load Lock Pedestal 300mm

  Features; Temperature Control Reliability Pre-Heat Solution Cost Competitivenes Novellus Vector Load Lock Pedestal Heater 300mm 300 C type     …

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• Novellus VECTOR Process Pedestal 300mm

  Features/specs: Temperature Uniformity Cost Competitiveness Weight: 28.56kg Material: Al 3003 Pipe: Al 3003 Heater Re: 12Ω ±1.5 Novellus Vector Process…

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• Aspen II/III – MATTSON HEATER BLOCK (200mm)

  PN: 303-05255-00 General Pin 3ea ( With Slit 4 ) for PECVD Features ● Leakage free ● Reliability ● Temperature Uniformity ●…

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• Novellus ALTUS PEDESTAL

  Altus Pedestal Heater  features; Reliability Temperature Uniformity Low COC Altus Pedestal Heater 200m Non MOER Ring ( Flat zone Type…

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• AIN(Aluminum Nitride) Heater

  Boboo provide high quality repair for AIN heater. Boboo produces their own ceramic plates. Level 1 : Mount Kit Change &…

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• SPRINGLESS DIAPHRAGM VALVES Ultra High Pure (UHP) Valves

  Low Pressure & High Pressure Valves are  Designed for Ultrahigh Purity Applications, with  SS316L and SS316L VAR Body Electropolished Wetted Surfaces,  Face Seal…

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• IR Halogen (EPI) Lamps

  IR Halogen Lamps QUARTZ INFRARED HALOGEN LAMPS Rhenium Alloys manufactures tubular double-ended (T-Style) infrared (IR) Quartz Halogen Lamps. Our primary…

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• MOCVD Heater Filaments

  For nearly 20 years Rhenium Alloys has been the leader in production of the highest quality rhenium heater filaments for the MOCVD…

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