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ESC (Electro Static Chuck) - EMP European Market Partner
  • https://empbv.com/wp-content/uploads/2019/04/boboo_esc_lam3.1.jpg
  • https://empbv.com/wp-content/uploads/2019/04/boboo_esc_lam3.2.jpg
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ESC (Electro Static Chuck)

Boboo Repairs a wide range of 150mm, 200mm and 300mm ESC for LAM and AMAT

LAM #374 / #608 / #611 ESC 300mm, type: Al2O3 for Etch process

P/N
839-019090-374
839-019090-608A
839-019090-611B

LAM #315 / #324 / #328 / #385 / #412 / #432 / #438 ESC 300mm for type: Al2O3, Johnsen – Rahbek Etch, Etch process
P/N
839-800327-315
839-019090-324
839-019090-328
839-800327-385
389-800327-412
389-800327-432
839-800327-438

AMAT Producer / E-Max / Enabler ESC 300mm for type: AlN,  Johnsen – Rahbek,  Etch process
P/N
0010-24774
0010-16392
0010-27784

LAM #508 ESC 200mm for type: AlN,  Johnsen – Rahbek,  Etch process
P/N
839-440562-508

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