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Automated Box Washer

Automated Box Washer dry-to-dry wet bench designed for cleaning wafer cassettes, transport boxes, lead frames, FOUPs, SMIF Pods, or other wafer handling parts.

  • Material Options: 304L stainless steel with 316L stainless steel cleaning chamber
  • Designed with a programmable logic controller (PLC) in addition to a color touchscreen that control the entire unit
  • Exhaust monitor failure alarm
  • Rotating top and bottom DIW spray bars
  • Static side DIW and N2 spray bars
  • Recirculating heated HEPA filtered drying system
  • On demand hot DIW heater
  • Surfactant reservoir metered dispense
  • Purged electrical compartments
  • Emergency power off
  • Seismic anchors
  • Welded sealed secondary containment
  • Hinged counterbalanced interlocked door with ergonomic product load/unload
  • Integrated recirculation of cleaning chemistry

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