Automated Box Washer
Automated Box Washer
Automated Box Washer dry-to-dry wet bench designed for cleaning wafer cassettes, transport boxes, lead frames, FOUPs, SMIF Pods, or other wafer handling parts.
- Material Options: 304L stainless steel with 316L stainless steel cleaning chamber
- Designed with a programmable logic controller (PLC) in addition to a color touchscreen that control the entire unit
- Exhaust monitor failure alarm
- Rotating top and bottom DIW spray bars
- Static side DIW and N2 spray bars
- Recirculating heated HEPA filtered drying system
- On demand hot DIW heater
- Surfactant reservoir metered dispense
- Purged electrical compartments
- Emergency power off
- Seismic anchors
- Welded sealed secondary containment
- Hinged counterbalanced interlocked door with ergonomic product load/unload
- Integrated recirculation of cleaning chemistry
