SCRUBBER DRY TYPE
SCRUBBER DRY TYPE
ARENS: Dry type resin scrubber
– Gas Processing: Resin(chemicals)
– Processing Capacity: 200LPM
– Dimension (Cabinet): 870(W)X850(D)X1700(H)
– Product Features: Effective absorption of target gas using resin
Do not use CW (reduces UT)
Powder trap detachable structure
– Compatible Gas
Metal Etch : BCl3, Cl2, HCl, ETC
Implant : BF3, PH3, ETC
