SCRUBBER DRY TYPE
ARENS: Dry Type Resin Scrubber
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Gas Processing: Resin (chemicals)
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Processing Capacity: 200 LPM
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Dimensions (Cabinet): 870(W) x 850(D) x 1700(H) mm
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Product Features:
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Effective absorption of target gas using resin
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Does not use cooling water (CW) to avoid reducing UT
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Detachable powder trap structure
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Compatible Gases:
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Metal Etch: BCl₃, Cl₂, HCl, etc.
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Implant: BF₃, PH₃, etc.
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