M100 ULTRASONIC FLOW METER
Instantaneous and integrated flow meter (ml/min) for accurate flow measurement with ultrasonic waveform analysis scope function. Includes automatic compensation for errors caused by chemical and temperature changes and provides various application technologies and maintenance tools through serial communication.
Features
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High-speed, precise flow measurement of liquids such as high-purity chemical solutions and ultra-pure water
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Multiple flow rate monitoring possible through RS-485 communication (Modbus)
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External power noise reduction according to power separation and RFI/EMI shielding of all input/output (CE certification)
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Flow rate measurement of various liquids (PR, DI, nitric acid, sulfuric acid, hydrogen peroxide, hydrofluoric acid, ammonia water, etc.)
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7-segment 4-digit display
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Built-in external output function – Analog Out: 4 ~ 20mA (16bit) / Output for Sol Valve control
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Minimizes installation space by integrating AMP/controller (2 & 6 channels)
Ideal for usage in applications such as:
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APM (Ammonium peroxide mixture): particle removal
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SPM (Sulfuric acid peroxide mixture): organic polymer removal
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HPM (Hydrochloric acid peroxide mixture): removal of metal impurities
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FPM (Fluoric acid peroxide mixture)