CVD
products
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SCRUBBER WET TYPE
W3000: Wet scrubber for semiconductors, LCD, and LED - Gas Processing: WET - Processing Capacity: 1500LPM - Dimension…
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SCRUBBER DRY TYPE
ARENS: Dry type resin scrubber - Gas Processing: Resin(chemicals) - Processing Capacity: 200LPM - Dimension (Cabinet): 870(W)X850(D)X1700(H) - Product Features:…
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SCRUBBER HEATER TYPE
WET BURN WET SCRUBBER - Powder pre treatment - Powder Gas Abatement - Direct Combustion UN2000A-BW Heat-wet scrubber compatible with…
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SCRUBBER PLASMA TYPE
ATOM 1000 - Plasma-wet scrubber compatible with semiconductor - Gas Processing: PLASMA WET - Processing Capacity: 300LPM - Dimension(Cabinet): 800(W)X800(D)X1720(H)…
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SCRUBBER BURN WET TYPE
BURN WET SCRUBBER - PFC Gas Abatement - LNG flame - Direct Combustion TRITON Maximizes the PM lifecycle with pre-processing…
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CHILLER HEAT EXCHANGER TYPE
Models like PCS150KUH + SECA150K (Ultra high temperature) - Stable operation under high temperature status - Fume Monitoring System -…
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Chiller Hybrid Type
Hybrid type Chillers, models like RPT7500C and HCS 7500C - Flow rate up to 50LPM - Power range 2-20kW - Temp…
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Chiller Refrigerant Type
Refrigerant type Chillers (a.o Cryogenic types) models like RUCS30000Z for Ultra low temperature and the RCS6000Z. - Temp range 100C…
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Accuheat™ Quartz In-Line Gas Heaters
Accuheat™ G-Series gas heaters. Quartz is the only material to contact gasses being heated, which prevent particle adders and contaminates.…
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Compact Tabletop Furnace
The SVCS Tabletop Furnace system provides a semiconductor grade quality tool for universities, R&D laboratories and pilot fabs. This system…
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Vertical Furnace for R&D and production
SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low pressure CVD processes. VTR is available with several…
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Horizontal PECVD Furnace
The design of the SVCS Plasma Enhanced Chemical Vapor Deposition furnaces combines the multiple process capability with the needs of…
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Horizontal LPCVD Furnace
The design of the SVCS Low Pressure Chemical Vapor Deposition furnaces combines the multiple process capability with the needs of…
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Novellus ALTUS PEDESTAL
Altus Pedestal Heater features; Reliability Temperature Uniformity Low COC Altus Pedestal Heater 200m Non MOER Ring ( Flat zone Type…
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AIN(Aluminum Nitride) Heater
Boboo provide high quality repair for AIN heater. Boboo produces their own ceramic plates. Level 1 : Mount Kit Change &…
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IR Halogen (EPI) Lamps
IR Halogen Lamps QUARTZ INFRARED HALOGEN LAMPS Rhenium Alloys manufactures tubular double-ended (T-Style) infrared (IR) Quartz Halogen Lamps. Our primary…
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MOCVD Heater Filaments
For nearly 20 years Rhenium Alloys has been the leader in production of the highest quality rhenium heater filaments for the MOCVD…