products

• RTP System (RHP200)

  RHP200 (8” for Semiconductor or LED)  is the rapid thermal processing system for 200mm silicon wafers which can be used…

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• RTP System (RHP150)

  RHP150 (6” for Semiconductor or LED)  is the rapid thermal processing system for 150mm silicon wafers which can be used…

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• Diffusion Furnace Loader

  Automatic Furnace Loader with Wafer Transfer Station transfers from Cassettes into process boats onto furnace cantilever. Safe and Easy loading…

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• Chemical Control Panel and Precursor Temperature Controller

  For Extremely stable temperature control Many modern reaction constituents for semiconductor and PV processes are available only in liquid phase.…

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• Compact Tabletop Furnace

  The SVCS Tabletop Furnace system provides a semiconductor grade quality tool for universities, R&D laboratories and pilot fabs. This system…

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• Vertical Furnace for R&D and production

  SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low pressure CVD processes. VTR is available with several…

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• Horizontal Diffusion Furnace

  The design of the SVCS atmospheric diffusion furnaces combines the multiple process capability with the needs of a maximum capacity…

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• RTP Lamphousing AMAT 200mm and 300mm

  Stainless Steel & Copper Brazed flex range RTP 200mm AMAT Centura  PN: 0040-36026 RTP radiance lamp housing PN: 0040-03905 RTP 300mm AMAT…

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• IR Halogen (EPI) Lamps

  IR Halogen Lamps QUARTZ INFRARED HALOGEN LAMPS Rhenium Alloys manufactures tubular double-ended (T-Style) infrared (IR) Quartz Halogen Lamps. Our primary…

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• Mercury Diffusion Heater (350°C-1250°C)

  Features In All Configurations Designed for fast ramp, fast cool operations Proprietary open coil helix design for greater radiant energy…

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• Apollo Diffusion Heater (1000°C)

  Features In All Configurations Designed for fast ramp, low temp operations Helix coil design for greater zone uniformity Line voltage…

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• Hercules Diffusion Heater (1300°C)

  Features In All Configurations Built-in reinforcements to guard against element sagging at zone interfaces End vestibules resistant to cracking and…

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• Vulcan Diffusion Heater (1350°C)

  Features In All Configurations Designed for high-temp operations Built-in reinforcements to guard against element sagging at zone interfaces End vestibules…

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• Collars & Heat Disks

  Produced from 100% high purity inorganic ceramic fibers of alumina and silica woven into textiles with a soft inner layer.…

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• Vestibule Blocks

  Produced from our proprietary vacuum-formed ceramic fiber insulation rated up to 1500°C. This is an engineered blend of fibers, resulting…

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• Torches

  We offer both high and low flow torch elements with an improved design, allowing for greater radiant energy pass through.…

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• Diffusion Heater Element Refurb & Service

  Each rebuilt diffusion heater element is carefully reverse engineered to assure exact replication of the original diffusion heater. Element components…

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• Quartz Horizontal Tubewash

  JST’s Quartz Horizontal Tubewash Station allows etching and washing of quartz tubes and miscellaneous quartz components. The unit includes two baths which…

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