Doping/ thermal
products
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RTP System (RHP200)
RHP200 (8” for Semiconductor or LED) is the rapid thermal processing system for 200mm silicon wafers which can be used…
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RTP System (RHP150)
RHP150 (6” for Semiconductor or LED) is the rapid thermal processing system for 150mm silicon wafers which can be used…
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Diffusion Furnace Loader
Automatic Furnace Loader with Wafer Transfer Station transfers from Cassettes into process boats onto furnace cantilever. Safe and Easy loading…
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Chemical Control Panel and Precursor Temperature Controller
For Extremely stable temperature control Many modern reaction constituents for semiconductor and PV processes are available only in liquid phase.…
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Compact Tabletop Furnace
The SVCS Tabletop Furnace system provides a semiconductor grade quality tool for universities, R&D laboratories and pilot fabs. This system…
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Vertical Furnace for R&D and production
SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low pressure CVD processes. VTR is available with several…
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Horizontal Diffusion Furnace
The design of the SVCS atmospheric diffusion furnaces combines the multiple process capability with the needs of a maximum capacity…
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RTP Lamphousing AMAT 200mm and 300mm
Stainless Steel & Copper Brazed flex range RTP 200mm AMAT Centura PN: 0040-36026 RTP radiance lamp housing PN: 0040-03905 RTP 300mm AMAT…
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IR Halogen (EPI) Lamps
IR Halogen Lamps QUARTZ INFRARED HALOGEN LAMPS Rhenium Alloys manufactures tubular double-ended (T-Style) infrared (IR) Quartz Halogen Lamps. Our primary…
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Mercury Diffusion Heater (350°C-1250°C)
Features In All Configurations Designed for fast ramp, fast cool operations Proprietary open coil helix design for greater radiant energy…
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Apollo Diffusion Heater (1000°C)
Features In All Configurations Designed for fast ramp, low temp operations Helix coil design for greater zone uniformity Line voltage…
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Hercules Diffusion Heater (1300°C)
Features In All Configurations Built-in reinforcements to guard against element sagging at zone interfaces End vestibules resistant to cracking and…
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Vulcan Diffusion Heater (1350°C)
Features In All Configurations Designed for high-temp operations Built-in reinforcements to guard against element sagging at zone interfaces End vestibules…
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Collars & Heat Disks
Produced from 100% high purity inorganic ceramic fibers of alumina and silica woven into textiles with a soft inner layer.…
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Vestibule Blocks
Produced from our proprietary vacuum-formed ceramic fiber insulation rated up to 1500°C. This is an engineered blend of fibers, resulting…
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Torches
We offer both high and low flow torch elements with an improved design, allowing for greater radiant energy pass through.…
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Diffusion Heater Element Refurb & Service
Each rebuilt diffusion heater element is carefully reverse engineered to assure exact replication of the original diffusion heater. Element components…
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Quartz Horizontal Tubewash
JST’s Quartz Horizontal Tubewash Station allows etching and washing of quartz tubes and miscellaneous quartz components. The unit includes two baths which…