Chemphobic Ultrapure Chemical Filter

Cobetter Chemphobic Filter Series are especially designed and ideally suited for high temperature and corrosive chemicals including hot H2SO4, H3PO4, HNO3, SPM, SC1, and SC2. The PTFE membrane ensures excellent chemical compatibility with consistent particles removal for a wide range of acids, bases and other process chemicals. All fluorine construction minimizes metal extractable and other contaminants and provides high flow rates and extended service life to meet high filtration efficiency.
Ultra-pure cleanliness reduces equipment set up time. Its one-piece structural design makes it easy to install and replace. Available in T, L and In-line configurations which simplify system design.

Application

• Semiconductor
• Wet etch and clean
• Bulk chemicals

Features

• Excellent chemical compatibility
• Higher flow rate and longer life time
• Ultra-low metal extractables

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