Novacon Ultra High Precision Chemical Filter
Cobetter Novacon Series
High retention efficiency, flow rates, and surface area allow for rapid operation. Cobetter Novacon Series is especially designed for acids, bases, and other process chemicals as a cost-effective alternative for wet etch and clean applications where low temperature is required.
The asymmetric PES membrane provides significant retention of particles (down to 1 nm) with additional characteristics including high flow rates, high dirt holding capacity, and longer filter lifetime. The membrane structure reduces bubble formation during flow. These filters have high mechanical strength and are suitable for a wide variety of filtration processes.
The HDPE cage ensures low metal extractables during filtration. Cobetter Novacon Disposable Filters have an all-fluorine construction. Their one-piece structural design makes them easy to install and replace while ensuring cleanliness.
Application
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Process: Wet Etch and Cleans
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Installation Point: Point of Tool
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Low temperature processes (<70°C)
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Chemistry: Dilute acids (e.g., BOE/DHF/SC2); dilute bases (e.g., SC1/TMAH); DIW
Features
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Reduce equipment pre-operation time
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Excellent retention
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Very high flow rates and longer life
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Ultra-low metal ion extractables option
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Manufactured in a cleanroom environment
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100% integrity tested