Cast Aluminum Solutions

Semiconductor and Wafer Processing Solutions CAS designs and manufactures critical in-chamber heating and cooling devices, as well as custom-engineered thermal devices for a variety of wafer processing applications. High-Purity Gas Heaters: CAS's PUR-Therm Gas Delivery Heaters offer high-purity heating chamber gases. Wet Bench Circulation Heaters: PUR-X and CAST-X Circulation Heater lines are compatible with solvent, DI water, and non-critical gas heating applications.

  • Stainless steel gas heaters
  • Stainless steel flow tubes (316L)
  • High Pressure Applications
  • Power range
  • 0,300 kW - 60 kW