Quartz Horizontal Tubewash
JST’s Quartz Horizontal Tubewash Station allows etching and washing of quartz tubes and miscellaneous quartz components. The unit includes two baths which are identical except that one bath is equipped with a rotation system. This rotation system provides a uniform cleaning process while minimizing chemical usage by rotating the tubes during the cleaning cycle. The process is controlled by an industrial-grade PLC with a touchscreen user interface for starting, stopping, and setting parameters. Adjustable recipe parameters offer further flexibility.
Exhaust and Controls
The exhausted plenum area provides secondary containment as well as housing for the process baths, chemical reservoir, and plumbing components. Process fumes are drawn down and around the baths into the plenum area and out through the facility exhaust. Operator controls are conveniently located at eye level. Electrical and pneumatic controls are housed in a purged head casing for safety and are readily accessible through a hinged front panel. Valves, filters, and pumps are located behind the front access panels for easy serviceability.
The Process
Load the quartz tube and start the cycle. The tube rotates while filtered chemical is pumped into it. The cycle continues until the predetermined timer expires. The chemical is then filtered and drained into the reservoir for future use. DI water is sprayed on and inside the tube; the drain closes and DI water covers the tube, beginning a cascade flow for a timed period. Once the cycle completes, a dump door opens and rapidly drains the rinse water. DI water is sprayed on the tubes for a final rinse. Once rinsing is complete, hot nitrogen is sprayed to dry the tubes.