Cobetter Chemrapid Filter Series

Cobetter Chemrapid Filter Series is composed of a surface-modified PTFE membrane bonded with PFA, resulting in ultra-low metal extractables. It solves the problem of defect fluidity caused by filter foaming. The Chemrapid Filter Series improves flow performance, cleanliness, and contamination control at low wafer defect levels for highly corrosive acids and bases. The modified PTFE membrane enables semiconductor makers to meet their critical chemical filtration requirements with superior filtration efficiency and high flow rates.

They are suitable for filtration of H₂SO₄, H₃PO₄, HNO₃, HCl, NH₄OH, H₂O₂, TMAH, and deionized water at room temperature, and SC1, SC2, SPM, metal etching, and other applications at high temperatures. Excellent chemical compatibility and ultra-low metal extractables ensure superior filtration efficiency and extended service life. The non-dewetting PTFE membrane increases surface energy, providing high flow rates and superior filtration efficiency.

Ultra-pure cleanliness reduces equipment setup time. Its one-piece structural design makes it easy to install and replace. Available in T, L, and In-line configurations to simplify system design.

Application

• Single wafer and batch processing in advanced technology nodes

• Wet etch and clean

• Chemicals

Features

• Excellent chemical compatibility

• All-fluorine construction suitable for filtration of highly corrosive, high-temperature chemicals

• Suitable for critical conditions

• 100% integrity tested

• High flow rates, low pressure drop, long service life

• Low extractables

• Provided prewet option, reducing equipment pre-operation time