Automated Wet Process Equipment

Whether processing 6″, 8″, or 12″ wafers or a combination, JST can design an automated wet process tool to meet your needs. Multiple platforms are available as well as a combination acid and/or solvent tool.

Multitasking is based on look ahead scheduling to ensure optimal throughput. Just load your cassettes and press the recipe start button and let the process begin.

Multiple automation platforms are available depending on your space constraints. JST offers front robots, rear robots or overhead robots with either front or side loading. Optional turntables are available for ergonomic side loading as well as rear access for ease of maintenance.

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