CMP Slurry Filtration Solution

Suitable for CMP polishing system in the slurry recirculation / global loop and at point-of-use (POU)

Fetaures

• Nano-fiber Media Multi-layer Nano-fiber media provides high flow rates and dirt holding capacity
• Patent on Filter Construction Design Perfectly integrate depth, pleated and rolled technologies in filter design
• Continuously Graded Pore Structure Effectively removes defective particles with the size distribution unchanged. Provides long service life and high dirt holding capacity.
• One-piece Construction: One-piece construction means it’s easy to install, clean, and replace

Types:

• Keevalid; Rolled or Melt-blown Depth PP Medium for CMP 50nm-40µm
• Pleavalid; Pleated PP Medium Filter for CMP 0.2µm-5.0µm
• Nylonvalid; Nylon Membrane Filter foor CMP 50nm-3.0µm

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