JST’s Spinner and Hot Plate workstations are designed for ease of use and service. Spinner modules and/or Hot Plate modules are mounted in a sealed deck area with easily accessible storage and maintenance thru hinged doors. A stainless steel enclosure is nitrogen purged and interlocked with a pressure sensor for safety. The lower exhausted storage has a secondary slide out containment drawer with optional JST re-usable or disposable DOT approved waste carboys. Carboys are equipped with full level sensing and quick disconnects.
Remote controls are mounted in the nitrogen purged headcasing or optional on the front roll.
Spinner Reliability is ensured with the an indirect drive system which protects the spin motor from chemicals. Vacuum and lid interlock are provided.
The bowl is Teflon. Options include polyethylene or Teflon liners. Drain and exhaust ports are located in the bottom of the bowl. Multiple spinner chucks and alignment fixtures are provided. Automated resist dispense, backside rinse, and edge bead removal are also optional.
Baking Hot Plates come with optional purge for an inert bake environment. Auto detect sizing is standard for the bake plate. Three automated bake recipes: contact, vacuum, and proximity are standard. Ramping control, 0.3% temperature uniformity across the surface and 0.1o C temperature resolution are all standard.
CO2 Fire Suppression Systems are optional.