Wet
EMP offers a wide range of ultrapure products for wet-etch processes, such as Pump, Filter housing, Filters, Valves, Fittings, Heaters, and many more.
products
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Filter Regeneration/Cleaning
Filter regeneration loop for Cartridges and disposable filter. Focus on PTFE membrane, PFA support net, PFA core, end cap and…
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ATEX (SOLVENT) PUMPS
Graco’s air operated double diaphragm pumps features our stall-free, low pulsation air valve, which is externally accessible—ensuring rapid changeovers and…
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PFA Storage Vessel
PFA Storage Vessel Used for example as a Buffer tank, drain storage container in chemical supply equipment (CDS) Aspirator option…
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PRESSURE VESSELS
Dispense Chemical With Absolutely No Pulsation White Knight’s PTFE and PFA pressure vessels provide laminar flow at the point of…
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Accubath™ PVDF, PFA Welded Tanks
White Knight/Imtec's process and rinse tanks are constructed from a single sheet of application specific plastic material that is CNC…
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PTFE molded process tanks
PTFE molded tanks. Many molds sizes available for tanks ranges from 40L - 550L . We can included customized locations…
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ACCUBATH™ (HEATED) QUARTZ PROCESS TANKS
Static Quartz Heated Tanks High Operating Temperatures – Operates up to 190° and can be used with any quartz compatible…
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CHILLER HEAT EXCHANGER TYPE
Models like PCS150KUH + SECA150K (Ultra high temperature) - Stable operation under high temperature status - Fume Monitoring System -…
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Chiller Hybrid Type
Hybrid type Chillers, models like RPT7500C and HCS 7500C - Flow rate up to 50LPM - Power range 2-20kW - Temp…
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Chiller Refrigerant Type
Refrigerant type Chillers (a.o Cryogenic types) models like RUCS30000Z for Ultra low temperature and the RCS6000Z. - Temp range 100C…
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CAST-X High Temp Circulation Heaters (stainless steel tubes)
With a temperature range to 1112°F (600°C), the CAST-X High Temp Circulation. These heaters feature bronze bodies. APPLICATIONS: - Rocket…
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CAST-X Circulation Heaters (stainless steel tubes)
Offered in 6 sizeswith up to 60 kW, CAST-X Heaters feature 316 SST flow-tubes with multiple enclosures & options. APPLICATIONS:…
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Universal Solvent Heater (stainless steel tubing)
A premium cast-in circulation heater with Stainless Steel tubing providing an array of special features to safely heat volatile solvents.…
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Accuheat™ Quartz In-Line Gas Heaters
Accuheat™ G-Series gas heaters. Quartz is the only material to contact gasses being heated, which prevent particle adders and contaminates.…
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Accuheat™ PFA In-Line Solvent Heaters
For heating Solvents such as IPA (Isopropyl alcohol), NMP, and much more. IMTEC introduces the high-purity PFA solvent inline heater.…
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Accuheat™ Quartz In-Line Chemical Heaters
Accuheat™ chemical in-line heaters consist of ultrapure quartz tubes, wrapped in an Inconel heater element that provides even, conductive heat…
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Accuheat™ PFA In-Line Chemical Heaters
White Knight/Imtec high-purity Accuheat PFA in-line heater are desinged for hydrofluoric acid (HF), potassium hydroxide (KOH), and other chemistry compatible…
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M400 Liquid flow controller Pinch Type (CMP/SLURRY)
Liquid Flow Controller LFC for SLURRY is a high-quality, high-precision semiconductor and industrial contactless Ultrasonic flow METER. • Target volume…
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M300 Ultrasonic Liquid Flow controller (LFC) electrical
The comprehensive solution MOTOR TYPE LFC is a high-quality, high-precision semiconductor and industrial non-contact LFC with built-in control valves •…
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M200 Ultrasonic liquid flow controller (LFC) air operated
Two types available, one for use in recirculation (circular) and one for point of use (seris general) Accurate flow measurement…
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M100 ULTRASONIC FLOW METER
Instantaneous and integrated flow meter (ml/min) for accurate flow measurement with ultrasonic waveform analysis scope function. includes Automatic compensation for…
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Chemical Resistant Miniature Solenoid Valves
White Knight/iPolymer Miniature Solenoid Valves include 2-Way and 3-Way Valves with a variety of body configurations, seat sealing methods and…
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(DILUTION) DRAIN VALVE
White Knight/iPolymer iPolymer Drain Valve (DV) is a large orifice valve capable of handling large volumes of corrosive fluids via…
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DI WATER VALVES
White Knight/iPolymer DI Water Valves are perfect 2-Way valves for DI water. The DI Water Valve wetted flow path is…
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PFA/PTFE CHECK VALVES 2 way flow
2 way flow space saver options max temp 120°C available connections flare, ferrule, and pipe connections sizes 1/4” – 2”…
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PTFE temperature sensor GCT100
• Sensor PT100 • Slurry and chemicals • PTFE fluid path • Fitting 1/2” Flare (tee fitting not included) •…
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PTFE Pressure Transducer GSC series
• types: single ended, flow through • operating temp 0-80°C • standard fluid path PTFE • available with sapphire diaphragm…
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Automated Parts Cleaning Systems
JST’s Automated Parts Cleaning System services a multitude of parts, performs a variety of chemical processes and restores specialty parts…
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Automated Box Washer
Automated Box Washer dry-to-dry wet bench designed for cleaning wafer cassettes, transport boxes, lead frames, FOUPs, SMIF Pods, or other…
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Chemical Fume Hood
JST’s Chemical Fume Hood is designed to provide a safe environment when working with volatile chemistries, by enclosing the entire…
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Triax Compact Wet Bench
When managing space limitations and a demand for increased throughput, JST’s 3-Axis Compact Automated Wet Bench is ideal for bringing…
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Heat Exchangers PTFE
Wooam is very knowledgeable making heat exchangers. They produce High Purity PTFE heat exchanger in different surfaces some of these…
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TraceTek® Leak Detection Systems
Water is everywhere in modern buildings, and that’s fine, as long as it stays where it belongs, in the process…
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PFA ultrapure tube and pipe
All of product made by specific extrusion facility for meet to high purity chemical Major Functions & Features 1. Manufactured…
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PFA Pipe fittings
PFA PIPE Fittings(FUSIBLE FITTING) used on PFA pipings and equipment utilize a butt welding method, which results in more robust…
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PFA “Masterlock” fittings
The UNION FITTING is widely used on main and Sub line PFA pipings that connect with CCSS and WET equipment…
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PFA Pneumatic valve (reinforced)
ACA Pneumatic valve's all wetted parts are made of PFA material and the valve is designed to generate optimal performance…
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PFA manual valves (reinforced)
ACA manual valve is made only of fluorine resin and is designed to generate optimal performance in handling high-purity chemicals.…
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PFA Pneumatic Valve
GCA Pneumatic valve's all wetted parts are made of PFA material and the valve is designed to generate optimal performance…
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PFA Manual Valves
G.C.A. manual valve is made only of fluorine resin and is designed to generate optimal performance in handling high-purity chemicals.…
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Quick Connectors
We offer a wide range of Quick Connectors for high purity applications. Operation Temp. : 5℃~70℃ Operation Pressure : <…
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Vortex PFA flow flowmeter
Tokico's PFA flow meter has no moving parts, and the parts in contact with liquid are composed by PFA resin,…
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Electronic Grade · Low Extractable Filter
EPPX Filter Cartridge Series EPPX series cartridge is an upgrade to EPP. EPPX Filter Cartridges are constructed of electronic grade…
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Prifend High Flow DI Water Filter
FDPHF Filter Cartridge Series Cobetter FDPHF High Flow Filter Cartridge is a large diameter, single open-ended pleated cartridge filter with…
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Apesfend Electronic-Grade DI Water Fine Filtration Filter
FDS Filter Cartridge Series Apesfend Filter Cartridges are constructed of a high polymer-based asymmetric PES membrane which provides high dirt…
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Prifend Long Lifetime Pre-RO Cartridge Water Filter
FDP Filter Cartridge Series Cobetter High Service Time FDP (Guard Filters) Filter Cartridges are made of continuously rolled microfiber. They…
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Resin PP/PVDF Constructed Filter Housing
Resin Filter Housing Series have the cage media composed of PP, PVDF or PC depending on the requirements and specifications.…
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CMP Slurry Filtration Solution
Suitable for CMP polishing system in the slurry recirculation / global loop and at point-of-use (POU) Fetaures Nano-fiber Media Multi-layer…
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Gasfender Ultra-pure Gas Cartridge Filter
Gasfender is constructed of electronic-grade stainless steel. It is specially designed for the inline gas filtration in the semiconductor process…
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Photogile POU Filter capsule for Litho
One-piece construction is easy to install, clean and replace this filter capsule. Available in a wide range of membranes to…
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Photopex Litho filters
Photopex Nylon Ultra-high Efficiency Filter With high flow rate performance, excellent retention capabilities and cleanliness, Cobetter Photopex Nylon Filter Cartridges…
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Fluorolink All Fluoropolymer Filter Housing
Overall PFA construction makes it suitable for highly corrosive high temperature ultra-pure chemicals Filter’s cleanliness reduces equipment pre-operation Compact structure…
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Chemrapid Surface-modified Ultrapure Chemicals Filter
Cobetter Chemrapid Filter Series are composed of a surface-modified PTFE membrane that is bonded with PFA which results in ultra…
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Chemega High-Efficiency Filtration for Chemicals
Chemega is constructed of a PTFE membrane that provides excellent chemical compatibility and is inherently hydrophobic. It is specically designed…
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Chemphobic Ultrapure Chemical Filter
Cobetter Chemphobic Filter Series are especially designed and ideally suited for high temperature and corrosive chemicals including hot H2SO4, H3PO4,…
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Novacon Ultra High Precision Chemical Filter
High retention efficiency, flow rates and surface area allow for a rapid operation Cobetter Novacon Series are especially designed for…
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Chemvast Absolute-Rated Filter Cartridges
Cobetter Chemvast Filter Series are available in wide variety of PTFE membranes including hydrophobic PTFE, hydrophilic PTFE or non-dewetting PTFE.…
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SPRAY GUNS
iPolymer’s extensive line of PTFE Spray Guns include DI Water and Chemistry Dispense, Recirculating, Nitrogen, and Eye Wash configurations. Our…
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Quick Dump Valves
Our Quick Dump ("QD") Valves are designed to rapidly drain process tanks. Constructed from high-purity polymers, which are selected to meet…
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Ultrapure In-Line PVDF/PFA Fluid Heaters
PVDF/PFA ultrapure in-line fluid heaters are ideal for heating deionized water, acids, and less aggressive process chemistries use in high-purity…
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Vesper™ PVDF/PFA Heat Exchangers
Vesper™ Series of PVDF/PFA heat exchangers offer a variety of solutions for heating, cooling, and temperature trimming of fluids used…
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PFA Immersion Tank Heaters
Heateflex immersion tank heaters are great for heating fluid baths to a constant temperature. These heaters are ideal for use…
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Aquarius® Deionized Water Heater Systems
Aquarius® deionized water (DIW) heater is the perfect solution for high-purity heating applications requiring accurate temperature control. Aquarius® heaters provide continuous flows…
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Ultrapure In-Line PFA Fluid Heaters
HC Series in-line heaters are ideal for high-temperature, ultrapure processes. They feature PFA flow paths for optimal compatibility with aggressive…
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Phenix Hyper Ultrasonic Cleaning Generator
Kaijo’s new Phenix Hyper system consists of our most effective ultrasonic cleaning generator, the Phenix Hyper and a static polished stainless…
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Quava Spot Shower Megasonic Cleaner
Kaijo’s Quava Spot Shower is designed for superfine cleaning of HDD Media, FPD glass and Semiconductor wafers. The Quava may…
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US Shower Megasonic Cleaner
Kaijo’s US Shower is a high frequency Megasonic cleaner that is suitable for both flat panel and wafer cleaning. Three…
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Quava Mini Megasonic Cleaning System
Compact and versatile, the table-top Quava Mini Megasonic cleaning system provides multiple frequencies in one unit. The use of Megasonic frequencies (200kHz…
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Quava Megasonic Cleaning System
Kaijo’s new Quava Megasonic cleaning system generator is designed for powerful and precise cleaning of semiconductors, Flat Panel Displays, hard disk, and…
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Ultrasonic Parts Cleaner
JST’s 100 Ultrasonic Parts Cleaner is self contained, fully automated roll in unit designed for precision parts cleaning. Place the…
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Quartz Horizontal Tubewash
JST’s Quartz Horizontal Tubewash Station allows etching and washing of quartz tubes and miscellaneous quartz components. The unit includes two baths which…
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Surface Tension Gradient Dryer (maragoni)
JST’s Combination Rinse and STG Dryer is capable of Quick Dump Rinsing (QDR) and IPA vapor drying substrates in a…
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IPA Vapor Dryer
JST’s “CLV” Dryer utilizes a patented, environmentally friendly, ultra clean technology for precision drying of silicon wafers, III-V Compound wafers, …
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Waste Drum Cabinet
JST’s drum cabinets can be configured a variety of ways to safely handle chemistry to and from the process baths in…
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Chemical Neutralization System
JST’s Neutralization reservoirs can be located remotely or within the workstations. Acids are drained into the reservoir where an alkaline solution…
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Pump cart
JST’s self-contained pump cart holds two disposable 5 gallon cans, an air pump with air line to activate the pump and…
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Chemical Delivery Cart
Standard Features • Capacity 5 to 40 Gallons • Class 10 Cleanroom Compatible • Pressurized Chemical Delivery Cart Docks with…
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Chemical Delivery System
JST’s Chemical Delivery Systems are available using drums for chemical storage or reclaim as well as providing fresh chemistry to process…
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OSPRAY Single Wafer Surface Preparation System
JST’s OSPRAY Single Wafer Etching and Stripping System utilizes an automated chemical spray process on a single wafer. The system…
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Spinner and Hot Plate workstation
JST’s Spinner and Hot Plate workstations are designed for ease of use and service. Spinner modules and/or Hot Plate modules are…
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Fumehood Design with Ergo Column
JST’s Fume Hood Workstations are made to provide an operator safe environment when working with volatile chemistries. Rinse and process baths…
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Vertical Laminar Flow Workstation (VLF)
JST’s VLF is designed for manual processing of 6″ or smaller wafers in a class 1,000 environment. The headcasing houses the…
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Chemical Workstations
JST’s Chemical Workstations are designed for use as an exhausted work surface for laboratory applications. Even airflow is provided across the…
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Lift Off / Resist Stripping Stations
Whether your metal lift off or resist stripping process demands a fully automated process or simply a manual configuration, JST’s Lift…
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The Tigress – Semi Automated System
JST’s two axis, front to back automated system is a compact, semi-automated system for processes that require uniformity without the…
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Automated Wet Process Equipment
Whether processing 6″, 8″, or 12″ wafers or a combination, JST can design an automated wet process tool to meet…
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Filter Housings
Two-chamber and four-chamber filter housings are available for parallel or series (in-line) operation. Their compact, non-metallic PTFE and PFA designs…
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Debubbler
CBA Series debubblers reduce bubbles from high-purity chemical delivery and wafer process systems. They feature 4-in inside diameters, which offer…
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Pressure Regulators
Automatically maintain and accurately control pressure for circulation loops or multiple dispense points without additional circuitry or feedback. Pressure regulators…
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Mini-Pump
Mini-pumps offer up to 300 ml/min flow rates and 160 psi discharge pressures. They feature Teflon® PTFE and PFA fluid…
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Metering Pumps
White Knight pneumatic and electronic metering pumps accurately dispense up to 100 ml and 50 ml, respectively. Their fully-supported Teflon®…
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Diaphragm Pumps
White Knight pneumatic diaphragm (AODD) pumps feature Teflon® PTFE or UHMW (PE) corrosion-resistant fluid paths. They are ideal for corrosive…
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Bellows Pumps
White Knight air-operated double-bellows pumps are used to manufacture semiconductors, photovoltaic solar cells, LEDs, flat-panel displays and electronics. These high-purity…