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US Shower Megasonic Cleaner

Kaijo’s US Shower is a high frequency Megasonic cleaner that is suitable for both flat panel and wafer cleaning. Three standard models are available that will provide effective cleaning of an area ranging from 330 mm to 660 mm. Custom and larger sizes are available.

Benefits:

  • High quality and reliable industrial equipment at competitive pricing
  • Effective cleaning for semiconductor wafers and flat panels
  • May be used for topside or bottom side cleaning

Features:

  • Can be equipped within a FPD cleaner with backside cleaning of substrate
  • Hi Megasonic cleaning provides precise cleaning of particles of less than 0.2µm
  • Provides less substrate damage due to high frequency (950kHz)

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