• https://empbv.com/wp-content/uploads/2019/04/boboo_pedestal1.jpg
  • https://empbv.com/wp-content/uploads/2019/04/boboo_pedestal2.jpg

Novellus ALTUS PEDESTAL

Altus Pedestal Heater 

features;

  • Reliability
  • Temperature Uniformity
  • Low COC

Altus Pedestal Heater 200m

  • Non MOER Ring ( Flat zone Type ) 02-033920-00
  • MOER Ring (Flat Zone Type ) 02-033395-00
  • MOER Ring (No Flat Type ) 02-033134-00
  • MOER Ring (No Flat Type ) 02-033134-01

Altus Pedestal Heater 300m

  • 16-341152-00
  • 16-377679-00
  • 16-342143-00
  • 16-377681-00
  • 02-281077-00
  • 02-292391-00
  • 02-282384-00

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