Novellus ALTUS PEDESTAL
Altus Pedestal Heater
features;
- Reliability
- Temperature Uniformity
- Low COC
Altus Pedestal Heater 200m
- Non MOER Ring ( Flat zone Type ) 02-033920-00
- MOER Ring (Flat Zone Type ) 02-033395-00
- MOER Ring (No Flat Type ) 02-033134-00
- MOER Ring (No Flat Type ) 02-033134-01
Altus Pedestal Heater 300m
- 16-341152-00
- 16-377679-00
- 16-342143-00
- 16-377681-00
- 02-292391-00
- 02-282384-00