Novellus VECTOR Process Pedestal 300mm
Features/specs:
- Temperature Uniformity
- Cost Competitiveness
- Weight: 28.56kg
- Material: Al 3003
- Pipe: Al 3003
- Heater Re: 12Ω ±1.5
Novellus Vector Process Pedestal Heater 300mm
Station #1 – Standard Ball type 02-263408-00
Station #1 – Standard Pin type 02-289758-00
Station #2,3,4 – Standard Ball type 02-264309-00
Station #2,3,4 – Standard Pin type 02-289742-00
Station #1,2 – Extreme Pin type 02-355935-00
Station #3,4 – Extreme Pin type 02-355937-00
Station #1,2 – Extreme Pin Thin type 02-364187-00
Station #3,4 – Extreme Pin Thin type 02-373416-00
Station #1,2 – Extreme Pin Thin type (TEOS XT) 02-384123-00
Station #3,4 – Extreme Pin Thin type (TEOS XT) 02-384125-00