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  • https://empbv.com/wp-content/uploads/2019/04/bobo_vector1.jpg

Novellus VECTOR Process Pedestal 300mm

Features/specs:

  • Temperature Uniformity
  • Cost Competitiveness
  • Weight: 28.56kg
  • Material: Al 3003
  • Pipe: Al 3003
  • Heater Re: 12Ω ±1.5

Novellus Vector Process Pedestal Heater 300mm

Station #1 – Standard Ball type              02-263408-00
Station #1 – Standard Pin type              02-289758-00
Station #2,3,4 – Standard Ball type      02-264309-00
Station #2,3,4 – Standard Pin type       02-289742-00
Station #1,2 – Extreme Pin type            02-355935-00
Station #3,4 – Extreme Pin type           02-355937-00
Station #1,2 – Extreme Pin Thin type  02-364187-00
Station #3,4 – Extreme Pin Thin type 02-373416-00
Station #1,2 – Extreme Pin Thin type (TEOS XT) 02-384123-00
Station #3,4 – Extreme Pin Thin type (TEOS XT) 02-384125-00

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