AIN(Aluminum Nitride) Heater
AIN(Aluminum Nitride) Heater
Boboo provide high quality repair for AIN heater. Boboo produces their own ceramic plates.
Level 1 : Mount Kit Change & Wet Cleaning
Level 2 : Embossing Re-creation, Rod Brazing
Level 3 : Shaft Change(Shaft Bonding)
Level 2 : Embossing Re-creation, Rod Brazing
Level 3 : Shaft Change(Shaft Bonding)
Features
• Good thermal conductivity (1080W/m.K)
• Maximum operating temperature 800 degree
• High durability
• Excellent corrosion resistance
• tested for HALF and TEOS process at Korean Semicon Fab
Advantages
• Heater design through the CFD
• Durable brazing technologies for electrodes and RF grounding
• ESC function added heater
200mm Producer Ceramic Heater
p/n; 0010-03840, 0010-03841, 0010-04978, 0010-08901, 0010-12282, 0010-17871, 0010-25323, 0010-25415, 0010-29675, 0010-38516, 0010-03287, 0010-03287
200mm CxZ Ceramic Heater (Giga fill ALN Heater)
p/n; 0010-03843
