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AIN(Aluminum Nitride) Heater - EMP European Market Partner
  • https://empbv.com/wp-content/uploads/2019/04/boboo_ain1.jpg
  • https://empbv.com/wp-content/uploads/2019/04/boboo_ain2.jpg
  • https://empbv.com/wp-content/uploads/2019/04/boboo_ain3.jpg

AIN(Aluminum Nitride) Heater

Boboo provide high quality repair for AIN heater. Boboo produces their own ceramic plates.

Level 1 : Mount Kit Change & Wet Cleaning
Level 2 : Embossing Re-creation, Rod Brazing
Level 3 : Shaft Change(Shaft Bonding)

Features
• Good thermal conductivity (1080W/m.K)
• Maximum operating temperature 800 degree
• High durability
• Excellent corrosion resistance
• tested for HALF and TEOS process at Korean Semicon Fab

Advantages
• Heater design through the CFD
• Durable brazing technologies for electrodes and RF grounding
• ESC function added heater

200mm Producer Ceramic Heater

p/n; 0010-03840, 0010-03841, 0010-04978, 0010-08901, 0010-12282, 0010-17871, 0010-25323, 0010-25415, 0010-29675, 0010-38516, 0010-03287, 0010-03287

200mm CxZ Ceramic Heater (Giga fill ALN Heater)

p/n; 0010-03843

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