Aspen II/III – MATTSON HEATER BLOCK (200mm)
PN: 303-05255-00 General Pin 3ea ( With Slit 4 ) for PECVD
Features
● Leakage free
● Reliability
● Temperature Uniformity
● Low COC
PN: 303-05255-00 General Pin 3ea ( With Slit 4 ) for PECVD
Features
● Leakage free
● Reliability
● Temperature Uniformity
● Low COC