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Novellus VECTOR Load Lock Pedestal 300mm

Features;

  • Temperature Control
  • Reliability
  • Pre-Heat Solution
  • Cost Competitivenes

Novellus Vector Load Lock Pedestal Heater 300mm

300 C type             02-146672-00
400 C type (New) 02-265257-00

Novellus VECTOR Process Pedestal 300mm
RTP Lamphousing AMAT 200mm and 300mm