Vertical Furnace for R&D and production
SVCS Vertical Thermal Reactor (VTR)
The SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low-pressure CVD processes. The VTR is available with several lengths of flat zone for both mass production and R&D applications. The single-tube setup with dual boat logistics is optimized for minimum downtime as well as low maintenance costs.
Typical Applications
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Annealing
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Diffusion
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Wet and dry oxidation
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LPCVD
Features
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Automatic wafer handling system for loading wafers from SMIF or FOUP closed pods
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Special automatic loading system by SVCS allowing loading from open cassettes, providing an exceptionally small footprint
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Quartz, SiC, or mono-Si boats can be used
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State-of-the-art modular control system, in-house designed, highly tailored, and in-house manufactured
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Top-notch components always selected for excellent results and trouble-free, long life of the furnace equipment
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Integration of vacuum pump systems in cooperation with leading vacuum pump manufacturers