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Vertical Furnace for R&D and production

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Vertical Furnace for R&D and production

SVCS Vertical Thermal Reactor (VTR)
The SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low-pressure CVD processes. The VTR is available with several lengths of flat zone for both mass production and R&D applications. The single-tube setup with dual boat logistics is optimized for minimum downtime as well as low maintenance costs.

Typical Applications

  • Annealing

  • Diffusion

  • Wet and dry oxidation

  • LPCVD

Features

  • Automatic wafer handling system for loading wafers from SMIF or FOUP closed pods

  • Special automatic loading system by SVCS allowing loading from open cassettes, providing an exceptionally small footprint

  • Quartz, SiC, or mono-Si boats can be used

  • State-of-the-art modular control system, in-house designed, highly tailored, and in-house manufactured

  • Top-notch components always selected for excellent results and trouble-free, long life of the furnace equipment

  • Integration of vacuum pump systems in cooperation with leading vacuum pump manufacturers

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