products

• SCRUBBER WET TYPE

  W3000: Wet Scrubber for Semiconductors, LCD, and LED Gas Processing: Wet Processing Capacity: 1500 LPM Dimensions (Cabinet): 1000(W) x 1230(D)…

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• SCRUBBER DRY TYPE

  ARENS: Dry Type Resin Scrubber Gas Processing: Resin (chemicals) Processing Capacity: 200 LPM Dimensions (Cabinet): 870(W) x 850(D) x 1700(H)…

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• SCRUBBER HEATER TYPE

  WET BURN WET SCRUBBER Powder pre-treatment Powder gas abatement Direct combustion UN2000A-BWHeat-wet scrubber compatible with semiconductor applications MAGMA1000Heat-wet scrubber compatible…

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• SCRUBBER PLASMA TYPE

  TOM 1000 Plasma-wet scrubber compatible with semiconductor applications Gas Processing: PLASMA WET Processing Capacity: 300 LPM Dimension (Cabinet): 800(W) x…

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• SCRUBBER BURN WET TYPE

  BURN WET SCRUBBER PFC Gas Abatement LNG flame Direct Combustion TRITONMaximizes the PM lifecycle with pre-processing effect for water-soluble gas…

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• CHILLER HEAT EXCHANGER TYPE

  PCS150KUH + SECA150K (Ultra High Temperature) Stable operation under high temperature conditions Fume Monitoring System Leak-proof design with gasket Diagnostic…

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• Chiller Hybrid Type

  Hybrid Type Chillers (RPT7500C and HCS7500C) Flow rate up to 50 LPM Power range: 2 – 20 kW Temperature range:…

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• Chiller Refrigerant Type

  Refrigerant Type Chillers (including Cryogenic Types) Models: RUCS30000Z (Ultra Low Temperature), RCS6000Z Temperature range: -100°C to 60°C Power range: 2…

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• Accuheat™ Quartz In-Line Gas Heaters

  Accuheat™ G-Series Gas HeatersQuartz is the only material to contact gases being heated, which prevents particle adders and contaminants. The…

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• Compact Tabletop Furnace

  SVCS Tabletop Furnace SystemThe SVCS Tabletop Furnace system provides a semiconductor-grade quality tool for universities, R&D laboratories, and pilot fabs.…

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• Vertical Furnace for R&D and production

  SVCS Vertical Thermal Reactor (VTR)The SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low-pressure CVD processes.…

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• Horizontal PECVD Furnace

  SVCS Plasma Enhanced Chemical Vapor Deposition FurnacesThe design of the SVCS Plasma Enhanced Chemical Vapor Deposition furnaces combines multiple process…

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• Horizontal LPCVD Furnace

  SVCS Low Pressure Chemical Vapor Deposition FurnacesThe design of the SVCS Low Pressure Chemical Vapor Deposition furnaces combines multiple process…

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• Novellus ALTUS PEDESTAL

  Altus Pedestal Heater  features; Reliability Temperature Uniformity Low COC Altus Pedestal Heater 200m Non MOER Ring ( Flat zone Type…

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• AIN(Aluminum Nitride) Heater

  Boboo provide high quality repair for AIN heater. Boboo produces their own ceramic plates. Level 1 : Mount Kit Change &…

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• IR Halogen (EPI) Lamps

  IR Halogen Lamps — QUARTZ INFRARED HALOGEN LAMPS Rhenium Alloys manufactures tubular double-ended (T-Style) infrared (IR) Quartz Halogen Lamps. Our…

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• MOCVD Heater Filaments

  For nearly 20 years, Rhenium Alloys has been the leader in the production of the highest quality rhenium heater filaments…

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