Diffusion Furnace Loader
Automatic Furnace Loader with Wafer Transfer Station transfers from cassettes into process boats onto furnace cantilever. Safe and easy loading of wafers onto furnace.
Features & Benefits
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The DFL (Diffusion Furnace Loader) transfers from cassettes into process boats onto furnace cantilever
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Safe and easy loading of wafers onto furnace
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User-friendly, menu-driven programming for operator and maintenance mode provides complete flexibility
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Easy “point and click” machine calibration with user interface graphics
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Full function Maintenance Mode allows qualified personnel to independently operate specific modules of the DFL
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Diagnostic and error-logging
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Includes safety sensors and safeguards to prevent wafer and/or machine damage