Diffusion Furnace Loader

Automatic Furnace Loader with Wafer Transfer Station transfers from Cassettes into process boats onto furnace cantilever. Safe and Easy loading of wafers onto furnace.

Features & Benefits

• The DFL (Diffusion Furnace Loader) transfers from Cassettes into process boats onto furnace cantilever.
• Safe and easy loading of wafers onto furnace.
• User friendly, menu driven programming for operator and maintenance mode provides complete flexibility.
• Easy “point and click” machine calibration with user interface graphics.
• Full function Maintenance Mode allows qualified personnel to independently operate specific modules of the DFL.
• Diagnostic and error-logging.
• Includes safety sensors and safeguards to prevent wafer and/or machine damage.

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