Diffusion Heater Element Refurb & Service
DS Fibertech Diffusion Heater Element Refurbishment
Each rebuilt diffusion heater element is carefully reverse-engineered to ensure exact replication of the original OEM heater. All refurbished elements match the dimensional, electrical, and operating specifications of the original. High-quality replacement components are used throughout the refurbishment process.
Items Replaced or Serviced During Refurbishment
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Hard ceramic (cleaned and replaced as needed)
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Kanthal element wire
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Inner stainless steel shell (if needed)
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Vacuum fiber insulation
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Top and bottom end chambers
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Kanthal terminal leads
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Pressure check of water cooling system
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Water cooling coil
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Replacement of all fittings as necessary
Supported OEM Heater Models
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Tokyo Electron (TEL): VMM-56-002APM, VMM-56-201APM, VMM-40-101APM, VMM40-102APM, VMU-40-102EXAPM, VMM-35-001APM, VMM-35-002APM, VMU-54-001APM, VMU-40-009APM, VMU40-007APM, VMU-40-007EXAPM, VMU-40-007SEAPM, VMU-40-003APM, VMU-28-017APM, VMU-28-014APM, VOS-56-003, VOS-56-002, VOS-40-017, VMU-40-007, VMU-40-103, VMM-40-101, VMM-40-102, VMM-40-005, VMU-28-017, VMU-54-001
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Hitachi Kokusai: F-330C-88V-4Z, F-330C-93V-4Z, D4EX04882, D4EX03531, D4EX02648
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Axcelis: ST-200
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Silicon Valley Group (SVG): 602783-02, 602783-03
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Other OEM Models: UL-260-08H-MK3(W), HDS-610A5-C, F-210V-87, FC-200, FC200L, DC-1300, DC-1300PLUS, DCHT-500
Semiconductor Diffusion Heater Repair & Replacement
DS Fibertech offers complete repair services and replacement parts for used diffusion heaters, ovens, and furnaces. Immediate 24-hour service may be available in urgent cases. Contact our sales team for a prompt repair quote.
Used & Reconditioned Equipment
DS Fibertech also sells used and reconditioned ovens, furnaces, and diffusion heaters. Contact us for an up-to-date inventory listing.
Diffusion Heater Element Burn-In Service
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Performed at DS Fibertech’s facility prior to shipping
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Helps form aluminum oxide on Kanthal wire, increasing tensile strength at high temperatures
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Prolongs element life and reduces wire elongation
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Elements arrive ready for immediate system installation, saving customers time