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Diffusion Heater Element Refurb & Service - EMP European Market Partner
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Diffusion Heater Element Refurb & Service

Each rebuilt diffusion heater element is carefully reverse engineered to assure exact replication of the original diffusion heater. Element components are the same as used by the OEM. Your refurbished elements will have the dimensional, electrical, and operating characteristics of the original OEM.

The following shows which items will be replaced during an element refurbishment. All items will be of the highest quality replacement parts and conform to the OEM original specifications.
1) Hard ceramic cleaned and replaced as necessary
2) Kanthal element wire
3) Inner stainless steel shell (if needed)
4) Vacuum fiber insulation
5) Top and bottom end chambers
6) Kanthal Terminal leads
7) Pressure check of water cooling system
8) Water cooling coil
9) Replace all fittings as necessary

DS Fibertech Corporation offers refurbishment service of diffusion heater elements from OEMs, such as:

Tokyo Electron (TEL):
VMM-56-002APM, VMM-56-201APM, VMM-40-101APM, VMM40-102APM, VMU-40-102EXAPM, VMM-35-001APM, VMM-35-002APM, VMU-54-001APM, VMU-40-009APM, VMU40-007APM, VMU-40-007EXAPM, VMU-40-007SEAPM, VMU-40-003APM, VMU-28-017APM, VMU-28-014APM, VOS-56-003, VOS-56-002, VOS-40-017, VMU-40-007, VMU-40-103, VMM-40-101, VMM-40-102, VMM-40-005, VMU-28-017, VMU-54-001

Hitachi Kokusai: F-330C-88V-4Z, F-330C-93V-4Z, D4EX04882, D4EX03531, D4EX02648
Axcelis:ST-200
Silicon Valley Group (SVG): 602783-02, 602783-03
Various Other OEM Models: UL-260-08H-MK3(W), HDS-610A5-C, F-210V-87, FC-200, FC200L, DC-1300, DC-1300PLUS, DCHT-500

Semiconductor Diffusion Heater Repair & Replacement
In addition to a full line of new equipment, DS Fibertech Corporation also offers repair service and replacement parts for used equipment. Immediate 24-hour service can be supported in some situations. A prompt quote for repairs may be obtained by contacting our sales office and explaining your specific needs.

Used & Reconditioned
Also available for sale, are used ovens, furnaces, and diffusion heaters, which are reconditioned at DS Fibertech Corporation. Please contact us for a complete and updated listing of our used equipment inventory.

Diffusion Heater Element Burn-In
DS Fibertech offers burn-in services for your heating elements at our facility, prior to shipping. Benefits of pre-conditioned elements:
Helps form aluminum oxide on the element wire
Oxide increases the tensile strength of the wire at high temperatures
Prolongs the life of the wire
Provides protections against elongation of the wire throughout the life of the element
Having DSF perform burn-in saves you time, element arrives ready for immediate system install

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