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Diffusion Heater Element Refurb & Service

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Diffusion Heater Element Refurb & Service

DS Fibertech Diffusion Heater Element Refurbishment

Each rebuilt diffusion heater element is carefully reverse-engineered to ensure exact replication of the original OEM heater. All refurbished elements match the dimensional, electrical, and operating specifications of the original. High-quality replacement components are used throughout the refurbishment process.

Items Replaced or Serviced During Refurbishment

  1. Hard ceramic (cleaned and replaced as needed)

  2. Kanthal element wire

  3. Inner stainless steel shell (if needed)

  4. Vacuum fiber insulation

  5. Top and bottom end chambers

  6. Kanthal terminal leads

  7. Pressure check of water cooling system

  8. Water cooling coil

  9. Replacement of all fittings as necessary

Supported OEM Heater Models

  • Tokyo Electron (TEL): VMM-56-002APM, VMM-56-201APM, VMM-40-101APM, VMM40-102APM, VMU-40-102EXAPM, VMM-35-001APM, VMM-35-002APM, VMU-54-001APM, VMU-40-009APM, VMU40-007APM, VMU-40-007EXAPM, VMU-40-007SEAPM, VMU-40-003APM, VMU-28-017APM, VMU-28-014APM, VOS-56-003, VOS-56-002, VOS-40-017, VMU-40-007, VMU-40-103, VMM-40-101, VMM-40-102, VMM-40-005, VMU-28-017, VMU-54-001

  • Hitachi Kokusai: F-330C-88V-4Z, F-330C-93V-4Z, D4EX04882, D4EX03531, D4EX02648

  • Axcelis: ST-200

  • Silicon Valley Group (SVG): 602783-02, 602783-03

  • Other OEM Models: UL-260-08H-MK3(W), HDS-610A5-C, F-210V-87, FC-200, FC200L, DC-1300, DC-1300PLUS, DCHT-500

Semiconductor Diffusion Heater Repair & Replacement
DS Fibertech offers complete repair services and replacement parts for used diffusion heaters, ovens, and furnaces. Immediate 24-hour service may be available in urgent cases. Contact our sales team for a prompt repair quote.

Used & Reconditioned Equipment
DS Fibertech also sells used and reconditioned ovens, furnaces, and diffusion heaters. Contact us for an up-to-date inventory listing.

Diffusion Heater Element Burn-In Service

  • Performed at DS Fibertech’s facility prior to shipping

  • Helps form aluminum oxide on Kanthal wire, increasing tensile strength at high temperatures

  • Prolongs element life and reduces wire elongation

  • Elements arrive ready for immediate system installation, saving customers time

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