Horizontal Diffusion Furnace
SVCS Atmospheric Diffusion Furnaces
The design of the SVCS atmospheric diffusion furnaces combines multiple process capability with the need for maximum capacity in full production systems (SVaFUR-FP) and high-flexibility small-scale versions for use in research and pilot production (SVaFUR-RD). It provides an easy-to-maintain, safe, and reliable horizontal furnace platform.
The SVCS design is outstanding for high efficiency, minimized footprint, and low cost of ownership while offering high process flexibility.
Atmospheric Processes
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Diffusion (drive-in) high-temperature processes
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Doping from solid, liquid, and gaseous dopant sources (e.g., BBr₃, B₂H₆, POCl₃, PH₃, BN)
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Various thermal processing (e.g., annealing, curing, sintering)
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Pyrogenic Wet Oxide with External Burning System
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Wet Oxide with ultra-pure steamer
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Dry Oxide
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HiPOx (High Pressure Oxide)
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DCE or HCl optional for all processes
Features and Benefits
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State-of-the-art modular control system; in-house designed, highly tailored, and in-house manufactured
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Top-notch components always selected for excellent results and trouble-free, long life of the furnace equipment
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Up to 4 stacked quartz or SiC tube reactor chambers for various processes
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Advanced water-cooling tube-level system with no thermal interference between different tubes
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Contactless, fully automated boat-in-tube loading in both cantilever or soft-loading configurations
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Maintenance-friendly mechanical design