Horizontal Diffusion Furnace

The design of the SVCS atmospheric diffusion furnaces combines the multiple process capability with the needs of a maximum capacity for full production system (SVaFUR-FP) and high flexibility small scale versions for use in research and pilot production (SVaFUR-RD). It provides an easy-to-maintain, safe and reliable horizontal furnace platform.

The SVCS design is outstanding for high efficiency, minimised footprint and low cost of ownership while offering high process flexibility.

Atmospheric Processes

• Diffusion (drive-in) high temperature procesess
• Doping from solid, liquid and gaseous dopant sources e.g.: BBr₃, B2H6, POCL₃, PH₃, BN
• Various thermal processing e.g. annealing, curing, sintering
• Pyrogenic Wet Oxide with External Burning System
• Wet Oxide with ultra pure steamer
• Dry Oxide
• HiPOx (High Pressure Oxide)
• DCE or HCl optional for all processes

Features and Benefits

• State of the art modular control system, inhouse designed, highly tailored and inhouse manufactured
• Top notch components always selected for excelent results and trouble free long life of the furnace equipment
• Up to 4 stacked quartz or SiC tube reactor chambers for various procesess
• Advanced water cooling tube level system no thermal interference between different tubes
• Contactless fully automated boat-in-tube loading both cantilever or softloading configurations
• Maintenance friendly mechanical design

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