Features In All Configurations
Automatic Furnace Loader with Wafer Transfer Station transfers from Cassettes into process boats onto furnace cantilever. Safe and Easy loading…
The SVCS Tabletop Furnace system provides a semiconductor grade quality tool for universities, R&D laboratories and pilot fabs. This system…
SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low pressure CVD processes. VTR is available with several…
The design of the SVCS atmospheric diffusion furnaces combines the multiple process capability with the needs of a maximum capacity…