M300 Ultrasonic Liquid Flow controller (LFC) electrical
M300 Ultrasonic Liquid Flow controller (LFC) electrical
The comprehensive solution MOTOR TYPE LFC is a high-quality, high-precision semiconductor and industrial non-contact LFC with built-in control valves
• Instantaneous control for the target flow rate
• Filtering Flow pulsation
• Precision flow measurement with ultrasonic wave scope function
• Providing a variety of application technologies and Maintenance tools through serial communication
• Monitoring Valve opening rate and ultra-precision flow control through encoder
• High speed control response (Target Flow Rate ±2% within 2 seconds)
• High-quality, high-precision semiconductors with built-in control valves as the industrial contactless LFCs
• Various chemical solutions can be controlled (DI, nitric acid, sulfuric acid, hydrogen peroxide, hydrofluoric acid, ammonia water, SC-1, IPA)
• Protected from the external power noise and input/output RFI/EMO shielding due to power separation (CE certification)
• Easy maintenance with control power and detector integrated contact
• Built-in external output (Sol Valve On/Off and Circular Valve)
• Stable ultra-precision flow control by using an encoder of an electric needle valve
• Mechanical Damper and Sensor (High limit, Low limit, ORG) built-in for stability and precision
