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Vertical Wafer transfer Systems

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Vertical Wafer transfer Systems

Different models possible

  • 1, 2, or 3 stage, moving heads, etc.

  • The Horizon Series V will transfer a maximum of 25 wafers between two cassettes, two process boats, or one process boat and one cassette. Senior series can handle up to 75 wafers.

  • As with all Mactronix wafer transfer systems, the Horizon Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.

  • PLC controlled, enhancing the transfer machine’s simplicity.

  • With the push of a button, the machine transfers wafers safely and automatically.

  • The Horizon Series V machines are designed to limit particle contamination by using a stepper motor with lead screw, “clean room grade” rails and bearings, and a 1.25″ non-process exhaust port.

  • The machine will not introduce more than 1.5 particles greater than 0.23 micron in diameter per wafer per transfer (machine must be exhausted to achieve this figure).

  • All aluminum parts are hard black anodized for corrosion resistance.

  • Electronic through-beam sensors are used to detect wafer presence in boats and retainers, thus preventing accidental double loading and scratches.

  • Lift system uses ramped speed controls for gentle pick-up and landing.

  • Pressure sensors are used both for personal safety and to prevent wafer damage by inhibiting machine operation.

  • Retainers default to closed position to prevent the dropping of wafers in the event of a power disruption, loss of air pressure, or both.

  • A “Maintenance/Cleaning Mode” is provided to facilitate preventative maintenance.

  • The Series V machines have been tested with up to 50,000 volts of electrostatic discharge without disruption to internal electronics. The Series V machines are virtually immune to RFI noise, EMF, and ESD.

  • Uptime will exceed 99.25%.

  • MTBF (mean time between failure): 2,500 hours

  • MTBA (mean time between assist): 1,000 hours

  • MTTR (mean time to repair): 1 hour

  • PLC controller is equipped with an RS422 communications port.

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