Heater Block Novellus Concept Ⅰ&Ⅱ Sequal
Boboo’s business started with making these Heater block. their Heater blocks have
- Best Temperature Uniformity
- Excellent Flatness
- Cost Competitiveness
Heater Block 150mm, Novellus C1,C2
type p/n
- Notch General 19-00155-01
- Non Notch General 19-00155-00
- Ground Hole 12EA 19-00155-01
- SLIT 3Line at Total 7 Stations 19-00155-01
- SLIT 5Line at Total 7 Stations 19-00155-01-S
- 28 Pinned at Total 7 Stations 19-032015-01
- 4 Pinned at First Station 19-032015-02
- 56 Pinned at Total 7 Stations 19-024371-01
Heater Block 200mm Novellus C1,C2
type p/n
- Non Notch General 19-00154-00
- SLIT 5Line at All 6 Stations 19-00154-00-S
- SLIT 5/3Line at All 6 Stations 19-00154-00-S
- Notch General 19-00154-01
- 24 Pinned at All 6 Stations 19-024227-00
- 4 Pinned at First Station 19-024227-01
- 4 Pinned at First Station & SLIT 5/3 Line 19-024227-01-S
- 24 Pinned at All 6 Stations & SLIT 5/3 Line 19-024227-01-SP
- 4 Pinned(8″) at Zero Station 19-024227-02
- 4 Pinned(6″) at First Station 19-027038-01
- 4 Pinned(6″) at First Station & SLIT 5/3 Line 19-027038-01-S