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Heater Block Novellus Concept Ⅰ&Ⅱ Sequal - EMP European Market Partner
  • https://empbv.com/wp-content/uploads/2019/04/boboo_hb1.jpg
  • https://empbv.com/wp-content/uploads/2019/04/boboo_hb2.jpg
  • https://empbv.com/wp-content/uploads/2019/04/boboo_hb3.jpg
  • https://empbv.com/wp-content/uploads/2019/04/boboo_hb4.jpg

Heater Block Novellus Concept Ⅰ&Ⅱ Sequal

Boboo’s business started with making these Heater block. their Heater blocks have

  • Best Temperature Uniformity
  • Excellent Flatness
  • Cost Competitiveness

Heater Block 150mm, Novellus C1,C2
type                                                           p/n

  • Notch General                             19-00155-01
  • Non Notch General                    19-00155-00
  • Ground Hole 12EA                     19-00155-01
  • SLIT 3Line at Total 7 Stations 19-00155-01
  • SLIT 5Line at Total 7 Stations 19-00155-01-S
  • 28 Pinned at Total 7 Stations   19-032015-01
  • 4 Pinned at First Station           19-032015-02
  • 56 Pinned at Total 7 Stations   19-024371-01

Heater Block 200mm Novellus C1,C2

type                                                                         p/n

  • Non Notch General                                              19-00154-00
  • SLIT 5Line at All 6 Stations                               19-00154-00-S
  • SLIT 5/3Line at All 6 Stations                           19-00154-00-S
  • Notch General                                                       19-00154-01
  • 24 Pinned at All 6 Stations                                 19-024227-00
  • 4 Pinned at First Station                                     19-024227-01
  • 4 Pinned at First Station & SLIT 5/3 Line       19-024227-01-S
  • 24 Pinned at All 6 Stations & SLIT 5/3 Line   19-024227-01-SP
  • 4 Pinned(8″) at Zero Station                               19-024227-02
  • 4 Pinned(6″) at First Station                               19-027038-01
  • 4 Pinned(6″) at First Station & SLIT 5/3 Line 19-027038-01-S

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