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EPI Foreline Tube Cleaner

JST’s EPI Semiconductor Foreline Tube Cleaner provides manual or semi-automated parts cleaning for tubes and vacuum components in an exhausted dual-contained wet bench.

  • Material Options: FM-approved PVC-C, or white polypropylene
  • Internal stainless steel frames isolated from process chemistry
  • Designed with a programmable logic controller (PLC) in addition to an industrial PC that control the entire wet bench
  • Ergonomically designed front load/unload access for product utilizing an automated vertical lift
  • Semi-automated operation platform
  • Front removable panels for easy maintenance access
  • Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
  • Automated chemical handling using an on-board chemical storage reservoir
  • Integrated re-circulation and filtration of process chemistries
  • Motorized assist product lifts

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