EPI Foreline Tube Cleaner
JST’s EPI Semiconductor Foreline Tube Cleaner provides manual or semi-automated parts cleaning for tubes and vacuum components in an exhausted dual-contained wet bench.
- Material Options: FM-approved PVC-C, or white polypropylene
- Internal stainless steel frames isolated from process chemistry
- Designed with a programmable logic controller (PLC) in addition to an industrial PC that control the entire wet bench
- Ergonomically designed front load/unload access for product utilizing an automated vertical lift
- Semi-automated operation platform
- Front removable panels for easy maintenance access
- Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
- Automated chemical handling using an on-board chemical storage reservoir
- Integrated re-circulation and filtration of process chemistries
- Motorized assist product lifts