EPI Foreline Tube Cleaner
JST’s EPI Semiconductor Foreline Tube Cleaner provides manual or semi-automated cleaning of tubes and vacuum components within an exhausted dual-contained wet bench. The system is designed for safe, efficient operation and easy maintenance, featuring robust materials and advanced controls.
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Material options: FM-approved PVC-C or white polypropylene
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Internal stainless steel frames isolated from process chemistry
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Programmable logic controller (PLC) plus industrial PC control for the entire wet bench
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Ergonomically designed front load/unload access with automated vertical lift
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Semi-automated operation platform
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Front removable panels for easy maintenance access
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Recessed bath design pulls chemical fumes through exhausted dual containment plenum
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Automated chemical handling with on-board chemical storage reservoir
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Integrated re-circulation and filtration of process chemistries
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Motorized assist product lifts