EPI Foreline Tube Cleaner

JST’s EPI Semiconductor Foreline Tube Cleaner provides manual or semi-automated parts cleaning for tubes and vacuum components in an exhausted dual-contained wet bench.

• Material Options: FM-approved PVC-C, or white polypropylene
• Internal stainless steel frames isolated from process chemistry
• Designed with a programmable logic controller (PLC) in addition to an industrial PC that control the entire wet bench
• Ergonomically designed front load/unload access for product utilizing an automated vertical lift
• Semi-automated operation platform
• Front removable panels for easy maintenance access
• Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
• Automated chemical handling using an on-board chemical storage reservoir
• Integrated re-circulation and filtration of process chemistries
• Motorized assist product lifts

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