Automated Box Washer
Automated Box Washer
Dry-to-dry wet bench designed for cleaning wafer cassettes, transport boxes, lead frames, FOUPs, SMIF Pods, and other wafer handling parts.
Material Options:
304L stainless steel frame with 316L stainless steel cleaning chamber.
Control System:
Programmable logic controller (PLC) with color touchscreen controls the entire unit.
Safety & Monitoring:
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Exhaust monitor failure alarm
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Emergency power off
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Seismic anchors
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Welded sealed secondary containment
Spray & Drying System:
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Rotating top and bottom DIW spray bars
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Static side DIW and N2 spray bars
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Recirculating heated HEPA-filtered drying system
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On-demand hot DIW heater
Chemical Management:
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Surfactant reservoir with metered dispense
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Integrated recirculation of cleaning chemistry
Design & Ergonomics:
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Purged electrical compartments
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Hinged counterbalanced interlocked door with ergonomic product load/unload