SCRUBBER PLASMA TYPE
SCRUBBER PLASMA TYPE
ATOM 1000
– Plasma-wet scrubber compatible with semiconductor
– Gas Processing: PLASMA WET
– Processing Capacity: 300LPM
– Dimension(Cabinet): 800(W)X800(D)X1720(H)
– Product Features”: High-temperature thermal equilibrium plasma
– High decomposition efficiency for PFC gas (99%) PFC gas processing equipment using high-temperature plasma ARC, without using a secondary heat source (LNG, LPG, etc.)
– Compatible Gas
– PFC GAS : NF3, SF6, CF4, C2F6, C3F8, ETC
– Flammable Gas : SiH4, DCS, TEOS, H2, PH3, ETC
– Water-soluble Gas : Cl2, HF, HCl, NH3, ETC
