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  • Products
    • White Knight
    • Boboo Hi Tech
    • Cobetter Filtration
    • DS Fibertech
    • E&IB
    • GlobalZEUS
    • JST
    • Kaijo
    • KFPI
    • Mactronix
    • RF Global Solutions
    • Rhenium Alloys Inc.
    • Rite Track
    • SVCS Process Innovation
    • Tokico
    • Truelok
    • Wooam Super Polymer
    • YOUNGDO
  • Processes
    • Deposition
      • CVD
      • PVD
    • CMP
      • CMP tools
    • Photo lithography
      • Spin Coater
      • Stepper
      • Spin Developer
    • Etching/ Material removal
      • Dry
      • Wet
    • Doping/ thermal
      • Diffusion
      • RTP
      • Implant
    • Process control
      • Inspection
      • Metereolgy
      • Wafer Handling Sorting
    • Facilities
  • Repairs
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Tag Archives for: "Furnace"
Home » Furnace
 Horizontal PECVD Furnace
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0
By Anoek Santegoeds
In
Posted 27/05/2020

Horizontal PECVD Furnace

The design of the SVCS Plasma Enhanced Chemical Vapor Deposition furnaces combines the multiple process capability with the needs of a maximum capacity for full production system (SVpFUR-FP) and [...]

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