Single Crystal Ingot Puller 200mm PSG-20

Features;

• Heating method : graphite resistance heating
• Power Supply : S.Heater 150KW, b.Heater 60KW
• Equipment : W 2,500 / D 3,500 / H 9,000
• Set up & Installation Included

Specifications;

• Ingot Diameter: 206mm (8” Wafer)
• Pull Chamber Height: 3000mm
• Pull Chamber: ID Φ305.5 mm
• FurnaceDiameter: ID 1050mm
• Wire Dia & Travel Stroke: Φ3.0, 6000mm (MAX : 7000mm)
• Seed Lift Speed: 0.1~10mm/min (MAX:1200mm/min)
• Position Resolution : 0.001mm/pulse
• Seed Rotate Speed: 0~30 RPM
• Crucible Travel Stroke: ≥ 600mm (MAX : 650mm)
• Crucible Lift Speed: 0.01~1mm/min (MAX : 200mm/min)
• Position Resolution : 0.001mm/pulse
• Crucible Rotate Speed: 0~10 RPM
• Reflector Stroke: 200mm
• Hot Zone Dimension: 24”
• Charge: 150Kg (MAX. 180Kg)
• Chamber Material- Inside : SUS316L, Outside : SUS304
• Argon Pressure & Flow: 2~3Kg/Cm2 / MAX Flow 200LPM

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