Single Crystal Ingot Puller 200mm PSG-20
Features;
- Heating method : graphite resistance heating
- Power Supply : S.Heater 150KW, b.Heater 60KW
- Equipment : W 2,500 / D 3,500 / H 9,000
- Set up & Installation Included
Specifications;
- Ingot Diameter: 206mm (8” Wafer)
- Pull Chamber Height: 3000mm
- Pull Chamber: ID Φ305.5 mm
- FurnaceDiameter: ID 1050mm
- Wire Dia & Travel Stroke: Φ3.0, 6000mm (MAX : 7000mm)
- Seed Lift Speed: 0.1~10mm/min (MAX:1200mm/min)
- Position Resolution : 0.001mm/pulse
- Seed Rotate Speed: 0~30 RPM
- Crucible Travel Stroke: ≥ 600mm (MAX : 650mm)
- Crucible Lift Speed: 0.01~1mm/min (MAX : 200mm/min)
- Position Resolution : 0.001mm/pulse
- Crucible Rotate Speed: 0~10 RPM
- Reflector Stroke: 200mm
- Hot Zone Dimension: 24”
- Charge: 150Kg (MAX. 180Kg)
- Chamber Material- Inside : SUS316L, Outside : SUS304
- Argon Pressure & Flow: 2~3Kg/Cm2 / MAX Flow 200LPM