The SWR-Series is designed to read the first available WaferID in a Cassette.
This system can be used to start a waferlot on a host-system or to make a recheck if the lot is in the correct process-step. The system is equipped with a wafer notch/flat-aligner and a waferID Reader.
After the cassette is placed on the system the wafers will be aligned, the first wafer is read and the Id is sent to the host over the interface.
Models available for 100, 125, 150 and 200mm wafers.
Cycletime to align, read the first wafer < 15 sec Low cost of ownership Compact footprint Full SECS/GEM compliance Windows operating system TouchPanel PC ESD safe RFID Cassette Identification on request Other Interfaces on request