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The SWTS-Series is designed for automatic wafer transfer.
With this system it is possible to split, merge, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with two load-ports and mechanical wafer notch/flat-aligners.
The waferhandling is realized via edge gripping, so no vacuum is required.
The system is equipped also with a automatic Mass Wafer Gripper to transfer a whole batch.
Models available for 100, 125, 150 and 200mm wafers.
Throughput up to 700 wph
Low cost of ownership
Tabletop system or with stand
No vacuum needed
Single and Mass Wafertransfer
Full SECS/GEM compliance
Windows operating system
RFID Cassette Identification on request
Upgrade to Waferidentification possible
Reliable and no wearing parts