The SWTM Mass Wafer Transfer tool is cabable of wafer transfer from plastic to plastic.
With this automatic system it is possible to transfer all wafer of a cassette to the other. The system is equipped with one cassette-stations, mechanical wafer notch/flat-aligner, and a Grippermechanism.
Models available for 100, 125, 150 and 200mm wafers.
Possible Transfer Modes:
Storage Cassette -> Process Cassette
Process Cassette -> Teflon Cassette
High Profile Cassette -> Low Profile Cassette
Throughput up to 2000 wph
Low cost of ownership
Integrated Flat/Notch Aligner
No vacuum needed
Full SECS/GEM compliance
RFID Cassette Identification on request