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Mass Wafer ID Read System – WMS-Series

The WMS-Series is designed to read the WaferID’s of a Waferlot.
With this system all 25 wafers or individual wafers can be read for wafer tracking. The system is equipped with a wafer notch/flat-aligner, a wafer presence/absence sensor, two linear-axis and waferID Reader. The Mapdata can be sent over the GEM-Interface or via ASCII-File to the host.

On request the WMS is able to read also the front and the backside of a wafer.
Models available for 100, 125, 150 and 200mm wafers.

Cycletime to align, scan and read 25 wafers < 80 sec Low cost of ownership Compact footprint 580 x 380 mm Full SECS/GEM compliance Windows operating system TouchPanel PC ESD safe Waferbackside ID-reading possible RFID Cassette Identification on request Other Interfaces on request Reliable

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