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Four Cassette Sorter – FCS-Series

The FCS-Series is designed for automatic sorting based on wafer Id’s.
With this system it is possible to split, merge, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with four load-ports, optical wafer notch/flat-aligner, a linear-robot and waferID Reader.

6″ and 8″ wafer-capability without change any hardware. (other wafersizes on request)
The throughput of this system is extremly high based on the smart design.
Models available for 100, 125, 150 and 200mm wafers.

Throughput up to 700 wph
Low cost of ownership
Compact footprint 1100 x 800 mm
Full SECS/GEM compliance
Windows operating system
ESD safe
13/25 slot cassette cabapility
Waferbackside ID-reading possible
Thinwafer cabapility upon request
Waferflipping on request (front to back, back to front)
Vacuumfree edgegripping on request
RFID Cassette Identification on request
Reliable and no wearing parts

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