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Exhausted Workstation (EWS)

JST’s exhausted Workstations are designed for manual processing of 8″ wafers or smaller in a class 100 or better environment. They have been certified to meet SEMI S2 and SEMI S8 requirements and the exhaust flow system has been independently certified to meet industrial ventilation requirements thru ASHRAE testing. The headcasing houses the electrical controls and is nitrogen purged. Emergency Power Off (EPO) is tied into the exhaust failure system and shuts down the power if exhaust fails.

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