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Automatic Flatfinder | FFXXX-Series

The tabletop automatic Flatfinder is designed to align a waferbatch.
The processed wafersurface will not touch the cassette during the alignment. 8 angles are stored and one is free programmable.
The integrated inspection mode allows the checking of the waferedges.
Models available for 100, 125, 150 and 200mm wafers.

Tabletop System
Very compact footprint 255 x 150mm
Precise alignment +/- 1°
One free programmable angle 0-360°
ESD safe

Integrated uController
LCD Display
Triggeroutput for RFID etc..
RS232 Interface for automation
Powersupply 110-230 VAC / 50-60 Hz

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